The XPS Spectra and Optical Properties of Al Doped ZnO Thin Films

LI Li,CHANG Ren-jie,FANG Liang,LI Qiu-jun,CHEN Xi-ming,FENG Shi-juan
2007-01-01
Abstract:Al doped ZnO(AZO) thin films with high quality were deposited on glass substrates by direct current(DC) reactive magnetron sputtering using a Zn target(99.99%) containing Al of 1.5%.The optical properties,compositional and element valence state of the AZO thin films was investigated by ultraviolet-visible light spectrophotometer and X-ray photoelectron spectroscopy(XPS),respectively.The results show that Zn atoms arein the oxidized state,Al atoms exist in the oxidized state or single atom,and O atoms mainly lie in the crystal lattice positions or are adsorbed.There is a strong influence of the annealing temperature on the optical properties of AZO thin films.The average value of the optical transmittity of the AZO thin films in the visible light region is 85% and it is slightly increased with rise of the annealing temperature.Simultaneously,with rise of the annealing temperature,the edge of ultraviolet absorption of the films shifts toward short wavelength,the optical band gap increases larger from 3.83 eV to 3.88 eV and the extinction coefficient sharply reduces with increasing the wavelength in the ultraviolet region.
What problem does this paper attempt to address?