Surface Acoustic Wave Rotation Motor

GM Zhang,LP Cheng,SY Zhang,J Yu,XJ Shui

DOI: https://doi.org/10.1049/el:20000974

2000-01-01

Electronics Letters

Abstract:A novel surface acoustic wave rotation motor configuration is proposed. A 127.8 degrees rotated y-cut LiNbO3 substrate is used as the staler. A specially designed disk is placed on the surface of the substrate and functions as the rotor. The motor successfully operates at a speed of 180rpm.

What problem does this paper attempt to address?

Study on surface acoustic wave rotary motor

程利平,张广明,张淑仪,郁炯,水修基

DOI: https://doi.org/10.3321/j.issn:0371-0025.2003.02.005

2003-01-01

Abstract:One hundred and twenty eight degrees rotated Y-cut x-propagation LiNbO3 was used for the Rayleigh wave propagation. On the surface of the substrate, two pairs of interdigital transducers (IDTs) operating at 30 MHz were parallelly arranged in the propagation direction as a stator. When high frequency voltage was input to two IDTs, two Rayleigh wave beams were generated and propagating in opposite directions with each other on the substrate, then local relative motion between the stator and the rotor was produced, so two inverse frictional forces form a moment to drive the rotor. Some experimental results of the motor are given: driven by a voltage about 120 Vp-p, the motor is accelerated to rotate at a speed of 270 rpm after 400 ms; meanwhile, theoretical analysis and calculation of operation mechanism of the motor are proceeded.
Noncontact rotary motors driven by surface acoustic waves

程利平,张淑仪,谷欢欢,水修基,杨跃涛

DOI: https://doi.org/10.15949/j.cnki.0371-0025.2011.02.026

2011-01-01

Abstract:On the basis of the research of friction-driven rotary motors, a kind of noncontact rotary motors driven by surface acoustic waves (SAWs) is fabricated. In the prototype of the motor, two surface acoustic waves propagating in the antiparallel directions are introduced on the stator, which are excited by two pairs of interdigital transducers (IDTs) on the 128°YX-LiNbO3 substrate. A liquid layer is loaded on the stator, and the rotor is suspended on the surface of the liquid. Two antiparallel acoustic streaming flows are produced by both acoustic waves in the liquid. The motion of the viscous liquid finally drives the rotor to move. Some preliminary experimental results, such as the variation of the angular velocity of the noncontact motors with the driving voltage of the IDTs, the thickness of the liquid layer and the viscosity of the liquids, are presented. It is also found that, with the same operating frequency, the threshold of the driving voltage of the noncontcat rotary motor is much smaller than that of the friction-driven ones.
Experimental Studies of a New Type of Non-Contact Rotary Motors Driven by Surface Acoustic Waves

He Zhang,Xiao-Dong Xu,Li-Ping Cheng,Shu-Yi Zhang

DOI: https://doi.org/10.1016/j.sna.2019.07.048

2019-01-01

Abstract:In this paper, a novel non-contact rotary motor driven by surface acoustic waves (SAWs) is presented. The SAWs are generated by a pair of focusing interdigital transducers (F-IDTs) on the stator, whose lower end is inserted into a liquid layer with an inclination angle. As a result, SAWs are conducted into a liquid layer from the top, forming acoustic streaming. The acoustic streaming drives the rotor, which is located at the surface of the liquid. It is found that when the inclination angle of the stator is about 66 degrees, the spin velocity of the rotor reaches its maximum, and the threshold driving voltage is the lowest. The dependence of the spin velocity of the rotor on various parameters is also investigated via a series of experiments. Compared to the contact rotary motors driven by SAWs, the noncontact motors rotate much faster, and the driving voltage is much smaller. (C) 2019 Elsevier B.V. All rights reserved.
Miniaturization of Surface Acoustic Waves Rotary Motor

LP Cheng,GM Zhang,SY Zhang,J Yu,XJ Shui

DOI: https://doi.org/10.1016/s0041-624x(02)00264-0

IF: 4.2

2002-01-01

Ultrasonics

Abstract:This paper presents the experimental study of a miniaturized surface acoustic waves (SAWs) rotary motor and the theoretical calculation. After the first success in SAW rotary motor operating at 9.85 MHz, a smaller rotary motor is designed. With the operating frequency of 30 MHz and the driving voltage of 120 Vp–p, the motor can rotate at a speed of 270 rpm.
A Standing Wave Ultrasonic Motor with Controllable Rotation Direction

YAN Ren-bo,CHU Xiang-cheng,GUI Zhi-lun,LI Long-tu

DOI: https://doi.org/10.3969/j.issn.1004-2474.2005.06.017

2005-01-01

Abstract:By shifting the standing wave pattern in space,a new design scheme to control the rotation direction of the standing wave ultrasonic motor is presented.The prototype motor shows the feasibility of the design and that the characteristics are the same while rotating in either direction.
Theoretical Simulation of a Rotary Motor Driven by Surface Acoustic Waves

L.-P. Cheng,G.-M. Zhang,S.-Y. Zhang,Z.-N. Zhang,X.-J. Shui

DOI: https://doi.org/10.1134/1.1560377

2003-01-01

Acoustical Physics

Abstract:A simulation model for theoretically studying the operation behavior of a rotary motor driven by surface acoustic waves (SAWs) is proposed. According to the model, some simulation results are obtained as follows: (1) as the rotor is excited by the SAWs, the motor experiences two phases, i.e., the acceleration phase and the steady phase; (2) the normal vibration amplitude A of SAWs has a very weak effect on the acceleration in the first phase but an enhancing effect on the steady velocity of the rotary motor; (3) as the number of the contact points between the rotor and the stator increases, the motor rotates more steadily; (4) as the rotor radius becomes smaller, both the acceleration and the steady angular velocity become greater. These features are in agreement with the experimental results.
Two-Dimensional Motor Based on Surface Acoustic Wave

Zhang Guan,Li Yigui,Zhang Junfeng,Yang Chunshen,Liu Jingquan

DOI: https://doi.org/10.4028/www.scientific.net/kem.483.128

2011-01-01

Key Engineering Materials

Abstract:With the development of high precision processing, the miniaturization demand of motors with super-precision positioning and simple fabrication become an urgent problem. This paper illustrates a surface acoustic wave (SAW) motor for two-dimensional positioning. The SAW motor include a SAW stator and a slide. In order to realize the two-dimensional moving, four Interdigital Transducer (IDTs) are fabricated on the four directions of a 0.5-mm thick, 128°YX- LiNbO3substrate. Comparing the aluminum material, the copper material selected to be used as IDT in our experiment has many advantages. Each of the four copper IDTs has 10 straight finger pairs in a simple repeating pattern, the IDT aperture is 10mm and the pitch is 400μm. The SAW stator is fabricated by the lift-off process. The dimension of the device is 29mm (width) X29mm (length). The slide consists of three ruby balls with the diameter of 1mm and an plastic disc with the thickness of 0.5mm and the diameter is 8mm. With the four radio frequency driving sources, two-dimensional motion is possible. The maximum speed of the slide that was placed on the SAW propagating surface was 5mm/s when the applied driving power was 28W and the applied driving frequency was 9.6MHz. The experiments indicate the two-dimensional motor based on SAW would be applicable to miniature motor and improve the resolution.
Note: A Disk-Shaft Shaped High-Speed Rotary Ultrasonic Motor

Le Wang,Yongjie Wang,Xiaolong Lu,Chunsheng Zhao

DOI: https://doi.org/10.1063/1.5065427

IF: 1.6

2018-01-01

Review of Scientific Instruments

Abstract:We report a novel high-speed rotary ultrasonic motor, which works at the out-of-plane vibration mode (B11 mode). This motor contains one tapered rotor and one metal disk-shaft shaped stator. The stator’s vibration mode B11 is excited by two pairs of piezoelectric ceramics attached to the bottom face of the disk. Through the traveling wave propagation at the contact faces, the shaft located at the center of the metal disk can effectively drive the rotor pressed onto it to rapidly rotate. One prototype motor with the appearance size of Φ 29 mm × 8 mm and a mass of 13 g is fabricated, and the experimental results show that it can rotate at a relatively high speed of up to 7000 rpm at the driving voltage of 350 Vp-p. The steady speed of the motor is 5000 rpm, and the maximum output torque is about 0.5 mN m. With merits of high speed revolution, a simple structure and a compact size, this motor is highly promising for many applications, such as precise instruments and miniaturized industrial robots.
Design of Spherical Two-Degree-of-Freedom Traveling-wave Type Ultrasonic Motor

傅平,郭吉丰,沈润杰,帅光举,蔡萍

DOI: https://doi.org/10.3321/j.issn:1000-6753.2009.04.007

2009-01-01

Abstract:Two degree-of-freedom spherical traveling wave type ultrasonic motor is a multi degree-of-freedom ultrasonic motor。Its structure is complex and difficult to be realized,but it has its merit.The driving principle and basic structure of this kind of spherical ultrasonic motor are firstly introduced,then some basic problems of motor are to be presented.Then structure of motor and optimal structure of stator and tuning devices are to be explained.Then this paper presents centering adjustment device and stator with big rake angle on outer edge and small rake angle on inner edge and tuning method of adjusting rake angle on outer edge of stator.The diameter of prototype motor is 45mm in rotor and 30mm in stator and maximum output torque is 119mNm,maximum speed is 12r/min.From the above discussion and practical experiments availability of devices is to be verified.Results are used for designing theory and performance improvement of two degree-of-freedom spherical traveling type ultrasonic motor
A Novel Two-Degree-of-freedom Spherical Ultrasonic Motor Using Three Travelling-Wave Type Annular Stators

Jian Wang,Xi-xing Hu,Ban Wang,Ji-feng Guo

DOI: https://doi.org/10.1007/s11771-015-2646-z

2015-01-01

Journal of Central South University

Abstract:In order to promote the tolerance and controllability of the multi-degree-of-freedom (M-DOF) ultrasonic motor, a novel two-degree-of-freedom (2-DOF) spherical ultrasonic motor using three traveling-wave type annular stators was put forward. Firstly, the structure and working principle of this motor were introduced, especially a spiral spring as the preload applied component was designed for adaptive adjustment. Then, the friction drive model of 2-DOF spherical motor was built up from spatial geometric relation between three annular stators and the spherical rotor which was used to analyze the mechanical characteristics of the motor. The optimal control strategy for minimum norm solution of three stators’ angular velocity was proposed, using Moore-Penrose generalized inverse matrix. Finally, a 2-DOF prototype was fabricated and tested, which ran stably and controllably. The maximum no-load velocity and stall torque are 92 r/min and 90 mN·m, respectively. The 2-DOF spherical ultrasonic motor has compact structure, easy assembly, good performance and stable operation.
A novel in-plane mode rotary ultrasonic motor

xiaolong lu,junhui hu,lin yang,chunsheng zhao

2014-01-01

Abstract:A novel in-plane mode rotary ultrasonic motor is designed in this paper. Four Langevin type bending vibrators are placed separately around the ring shaped stator and used to excite an in-plane vibration mode of the ring stator. Two tapered rotors are assembled to the inner ring of the stator and clamped together by screw nut. A thin cylindrical supporting is placed under the stator ring, which makes the motor more stable and convenient to fix. This ultrasonic motor has no bearings, which is good at operating in cryogenic and vacuum environment.
A novel rotary piezoelectric motor for aerospace application

Xiaolong Lu,Junhui Hu,Chunsheng Zhao

DOI: https://doi.org/10.1109/SPAWDA.2012.6464031

2012-01-01

Abstract:A novel in-plane mode rotary ultrasonic motor is designed in this paper. Four Langevin type bending vibrators are placed separately around the ring shaped stator and used to excite an in-plane vibration mode of the ring stator. Two tapered rotors are assembled to the inner ring of the stator and clamped together by screw nut. A thin cylindrical supporting is placed under the stator ring, which makes the motor more stable and convenient to fix. This ultrasonic motor has no bearings, which is good at operating in cryogenic and vacuum environment.
Two Degree of Freedom Spherical Ultrasonic Motor With Three Traveling-wave Stators

HU Xi-xing,GUO Ji-feng

DOI: https://doi.org/10.13334/j.0258-8013.pcsee.2010.09.011

2010-01-01

Abstract:A novel type of 2DOF (two degree of freedom) spherical ultrasonic motor with three traveling-wave type stators was developed.Its structure and driving principle are introduced,especially a spiral form of the spring was presented.The key issue of the self-regulation between the stators and the spherical rotor was solved,and the errors caused by processing and installation were overcomed by making use of the special-made spring.Ensured that the preload between the stators and the spherical rotor was more uniform and smooth.The mathematics model of the motor was established based on the Friction Drive Model,and the analytical expression of mechanical characteristics calculation was deduced.The features of the mechanical characteristics were acquired by make the minimum Euclidean norm as a target.The developed motor has φ40 mm rotor,the maximum output torque reaches 0.12N·m,the maximun speed is 90r/min,and the performance is consistent in all directions.This type spherical motor has many advantages of compact structure,convenient installation,prominent performance.It has significant application in many field,such as robotics manipulator's joint,CCD working stage.
Optimization and Simulation of the Surface Acoustic Wave Motor

XQ Cui,L Wu,HJ Zhang

DOI: https://doi.org/10.1117/12.483178

2002-01-01

Abstract:Using the numerical analysis method, the mechanism of the surface acoustic wave (SAW) motor is further discussed, the performances of the SAW motor under different slider and stator contact conditions are examined, and many factors that affect the efficiency of the SAW motor are introduced. In addition, the design of SAW motor with power circulation structure is illustrated. Experiments show that the efficiency of the SAW motor increases, and the threshold driving voltage of the SAW motor reduces.
An Intriguing Feature of Linear Motors Driven by Surface Acoustic Waves

Li-Ping Cheng,Li Fan,Xiao-Dong Xu,Shu-Yi Zhang

DOI: https://doi.org/10.1134/s1063771023600675

2023-01-01

Acoustical Physics

Abstract:Motors driven by surface acoustic waves (SAWs) have been extensively investigated due to their potential applications in various environments. One of the problems we are confronted with is the lifetime of the substrate which supports SAWs since it becomes fragile when large-amplitude SAWs are excited on the substrate. In order to prolong the lifetime of the substrate, we propose to apply modulated driving voltage with a duty ratio to the interdigital transducers. With the implementation of such a proposal, we found an intriguing phenomenon which is out of expectation, i.e., when the driving voltage is high, the slider speed under modulated driving with a suitable duty ratio might be larger than that with the continuous driving .
A Rotary Ultrasonic Motor Using Radial Bending Mode of Ring with Nested PZT Excitation

Ying-xiang Liu,Jun-kao Liu,Wei-shan Chen,Xiao-hui Yang

DOI: https://doi.org/10.1631/jzus.a1100225

2012-01-01

Journal of Zhejiang University SCIENCE A

Abstract:This study presents and verifies a new idea for constructing a rotary traveling wave ultrasonic motor (USM) that uses the radial bending mode of a ring. In the new design, 20 trapezoid cross section slots are cut symmetrically in the outer surface of a thick duralumin alloy ring, where 20 PZT stacks are nested. In each slot, two wedging blocks are set between the PZT stack and the two sides of the slot respectively to apply preloading on the PZT ceramics. Two radial bending modes of the stator that have a phase difference of a quarter wavelength on space are generated by using the d33 operating mode of the PZT elements, and then a flexural traveling wave is formed by the superimposing of two standing waves whose amplitudes are equal and phases are different by 90° temporally. Two conical rotors are pressed to each end of the ring type stator by a coiled spring. The finite element method (FEM) simulation is developed to validate the feasibility of the proposed motor. The maximal speed and torque of the prototype are tested to be 126 r/min and 0.8 N·m, respectively.
Novel Multi-Dof Ring-Shaped Standing-Wave Type of Ultrasonic Motor

ZHANG Jian-tao,JIN Jia-mei,ZHAO Chun-sheng

DOI: https://doi.org/10.3969/j.issn.1000-3835.2011.12.043

2011-01-01

Abstract:A novel multi-DOF ring-shaped standing-wave type of ultrasonic motor was proposed.It was composed of a spherical rotor and a ring-shaped stator.The motor using the second order in-plane vibration mode could rotate in three directions.Here,the motor's operation and driving mechanism was analyzed in detail.A prototype motor was fabricated according to the results of finite element design.The motor's stator had the size of 25.7 mm(length)×25.6 mm (width)×25.7 mm(height),and the operating frequency of 26.76 kHz.Its rotational speeds in three directions were 12 r/min、10 r/min and 12 r/min,respectively.The motor had the advantages of small volume,simple and compact structure,and not considering the frequency consistency of different working modal frequencies.It could be applied in various fields of small robots,robot eyes,robot hands,and attitude adjustment of mechanisms.
Nonreciprocal magnetoacoustic waves with out-of-plane phononic angular momenta

Liyang Liao,Fa Chen,Jorge Puebla,Jun-Ichiro Kishine,Kouta Kondou,Wei Luo,Degang Zhao,Yue Zhang,You Ba,Yoshichika Otani

DOI: https://doi.org/10.1126/sciadv.ado2504

2024-07-12

Abstract:Surface acoustic wave (SAW) can carry phononic angular momentum, showing great potential as an energy-efficient way to control magnetism. Still, out-of-plane phononic angular momentum in SAW and its interaction with magnetism remain elusive. Here, we studied the SAW-induced magnetoacoustic waves and spin pumping in Ni-based films on LiNbO3 with selected SAW propagation direction. The crystal inversion asymmetry induces circularly polarized phonons with large out-of-plane angular momenta so that up to 60% of the SAW power attenuates nonreciprocally controlled by the out-of-plane magnetization component. The SAW propagation direction dependence of the nonreciprocity verifies the crystal origin of the phononic angular momentum, and a chiral spin pumping demonstrates that the circular polarization can control the spin current generation efficiency. These results provide an additional degree of freedom for the acoustic control of magnetism and open an avenue for applying circularly polarized phonons.
A Novel High-Speed Rotary Ultrasonic Motor Applied to Micro Air Vehicles

Le Wang,Xiao-long Lu,Chun-sheng Zhao,Cheng Xue

DOI: https://doi.org/10.1109/spawda.2016.7829984

2016-01-01

Abstract:In this paper, a high-speed rotary ultrasonic motor based on out-of-plane flexural vibration mode is proposed, fabricated and characterized. This motor consists of one tapered rotor and one metal disk shaped stator. There are four piezoelectric plates bonded to the bottom face of the metal disk for exciting the stator's out-of-plane flexural vibration mode. The shaft is used to amplify the vibration amplitude of the metal disk. The rotor pressed on the conical surface of the shaft can be driven to rotate by the traveling wave propagation via the contact friction force. The preload between the stator and rotor is applied by one nut screwed to the solid shaft. The stator has a diameter of 22mm and weight of 13 gram. Experimental results show that the proposed motor can rotate at the maximum value of 7000 rpm applied with the driving voltage of 350 V p-p .

Surface Acoustic Wave Rotation Motor

Study on surface acoustic wave rotary motor

Noncontact rotary motors driven by surface acoustic waves

Experimental Studies of a New Type of Non-Contact Rotary Motors Driven by Surface Acoustic Waves

Miniaturization of Surface Acoustic Waves Rotary Motor

A Standing Wave Ultrasonic Motor with Controllable Rotation Direction

Theoretical Simulation of a Rotary Motor Driven by Surface Acoustic Waves

Two-Dimensional Motor Based on Surface Acoustic Wave

Note: A Disk-Shaft Shaped High-Speed Rotary Ultrasonic Motor

Design of Spherical Two-Degree-of-Freedom Traveling-wave Type Ultrasonic Motor

A Novel Two-Degree-of-freedom Spherical Ultrasonic Motor Using Three Travelling-Wave Type Annular Stators

A novel in-plane mode rotary ultrasonic motor

A novel rotary piezoelectric motor for aerospace application

Two Degree of Freedom Spherical Ultrasonic Motor With Three Traveling-wave Stators

Optimization and Simulation of the Surface Acoustic Wave Motor

An Intriguing Feature of Linear Motors Driven by Surface Acoustic Waves

A Rotary Ultrasonic Motor Using Radial Bending Mode of Ring with Nested PZT Excitation

Novel Multi-Dof Ring-Shaped Standing-Wave Type of Ultrasonic Motor

Nonreciprocal magnetoacoustic waves with out-of-plane phononic angular momenta

A Novel High-Speed Rotary Ultrasonic Motor Applied to Micro Air Vehicles