Low-noise Visible-Blind UV Avalanche Photodiodes with Edge Terminated by 2° Positive Bevel

F Yan,C Qin,JH Zhao,M Weiner,BK Ng,JPR David,RC Tozer
DOI: https://doi.org/10.1049/el:20020216
2002-01-01
Electronics Letters
Abstract:4H-SiC avalanche photodiodes edge terminated by a 2degrees positive bevel have been fabricated and characterised. Low leakage current, positive temperature dependence of breakdown voltage, high avalanche gain and very low noise have been achieved.
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