980Nm Bottom-Emitting Vcsel with an Output Power of 1.95W

YF Sun,YQ Ning,ZH Jin,L Qin,CL Yan,C Wang,Y Liu,GT Tao,GQ Chu,J Liu,LJ Wang
DOI: https://doi.org/10.1117/12.573195
2005-01-01
Abstract:The high power bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) with a wavelength of 980nm are described. The device has been fabricated by using oxidation confinement technology. Al2O3 film, instead of SiO2 film is used as the passivation layer to enhance heat dissipation. A distinguished device performance is achieved. The maximum continuous-wave (CW) output power of large aperture devices with active diameters up to 500 mu m is as high as 1.95W at room temperature, which is to our knowledge the highest value reported for a single device. Size dependence of the output power, the threshold current and the differential resistance is discussed.
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