Beam Focusing Characteristics of the Field Emission Arrays with Parallel Wedge Emitter, Gates and In-Plane Lens

CF Yang,BQ Zeng,ZH Yang,SJ Qian
DOI: https://doi.org/10.1109/icmmt.2002.1187648
2002-01-01
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Abstract:A focusing structure of field-emission arrays (FEAs) made of a parallel planar emitter, gate, and in-plane lens is suggested. Using the particle-in-cell simulation code MAGIC, the diamond-film FEAs made of a strip planar emitter, a parallel gate, and an anode with and without an in-plane lens have been simulated. The electron-beam streamlines and the x-py phase show that the in-plane lens focuses the electron beam. For a typical model, the beam width decreases about 1/10 for every cell, and the transverse velocity decreases from ±5.5×106 to ±0.4×106 m/s when including the in-plane lens. This structure can be used as a moderated field-emission cathode to emit a collimated electron beam, such as in field-emission displays.
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