The Effect of Ti-doping and Stress Relaxation Layer on Adhesion Strength of DLC Thin Film

NIE Chao-yin,Akiro Ando,LU Chun-can,LIAO Bing
DOI: https://doi.org/10.3321/j.issn:1001-9731.2009.02.014
2009-01-01
Journal of Functional Biomaterials
Abstract:The influence of Ti doping on the adhesion strength of diamond-like carbon(DLC) thin films prepared by unbalanced magnetron sputtering was studied.In addition,in order to improve more the adhesion strength of Ti-doping diamond-like carbon(Ti-DLC) thin films,Ti stress relaxation layers were introduced in Ti-DLC thin film and form a Ti/Ti-DLC/Ti/Ti-DLC……soft and hard alternative multilayer thin film.The adhesion strength of these multilayer thin films were also studied in this paper.The adhesion strength and hardness of the thin films were measured by nano-scratch tester and microhardness tester.The results showed: Ti doping can improve remarkably the adhesion strength of the DLC thin films,but there is also a relatively strong influence on the hardness.The introduction of Ti stress relaxation layer further improve the adhesion strength of the Ti-DLC thin films,as to reach or exceed the level of TiN thin film.As to the improvement of the adhesion strength,there is an optimum thickness of Ti stress relaxation layer.A special multiple structure with variable period design can increase the adhesion strength and maintain the hardness of the Ti-DLC thin films.That is to apply relatively small modulate period on the surrounding interface here there is a concentrated high stress,and applying large modulate period clear to the top of the thin film.
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