Improving hydrophobic property of sol-gel antiveflective silica coatings by FAS

Liang-hong YAN,Xiao-dong JIANG,Bo JIANG,Hai-bin L(U),Xiao-dong YUAN
2007-01-01
High Power Laser and Particle Beams
Abstract:Using TEOS as precursor,ammonia as catalyst,silica antireflective coating was prepared by sol-gel process.To obtain hydrophobic properties,the silica coatings were surface-modified with fluoroal kylsilane(FAS) by self-assembly technique.FTIR-spectroscopy,UV-vis spectroscopy,scanning probe microscopy and contact angle measurement were used to measure the properties of the silica coatings.The results show that the peak transmittance of the hydrophobic coating is 99.7%,and the water contact angle of the hydrophobic coating is 110°.The FAS surface modification does not influence the optical properties of the coating,but improve its hydrophobicity remarkably.
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