Hydrogen Sensor Based on D-shaped Fiber Bragg Grating Coated with WO3-Pd Composite Films

DAI Ji-xiang,YANG Ming-hong,CHEN Yun,CAO Kun,LIAO Jun-sheng,ZHANG Peng-cheng
DOI: https://doi.org/10.3788/gzxb20114007.1003
2011-01-01
Abstract:40 nm WO3-Pd composite film was sputtered on the side-face of side-polished fiber Bragg grating(D-shaped FBG).The FBG sensing head with 40 nm WO3-Pd composite film was firstly prepared by a 5 nm WO3 coating realized with radio frequency(RF)sputtering process,followed by depositing 5 nm WO3/Pd composite film,and then finished with 30 nm Pd film by direct-current(DC) sputtering method.SEM results show that WO3-Pd composite film still has good surface morphology after several cycle′s hydrogen response,which indicates WO3-Pd composite film has good mechnical property.The experiment results demonstrate hydrogen sensor has good repeatability under different concentration hydrogen.Compared to standard FBG coated with same hydrogen sensitive film,the sensitivity of D-shaped FBG is increased by 200%.When the hydrogen concentration is 6% in volume,the wavelength shift of D-shaped FBG is about 15 pm.D-shaped FBG hydrogen sensor has great potential in hydrogen′s measurement.
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