Abstract:TiO2 thin films were deposited on polymer substrates (polyethylene terephthalate and polystyrene) at low substrate temperature (< 120 degrees C) from radiofrequency inductively coupled O-2/titanium tetraisopropoxide (TTIP) plasmas. The film growth was tuned by controlling the O-2/TTIP flow rate ratio and pulsing the plasma power. The nanostructure including the film morphology and crystallization was thoroughly characterized by transmission electron microscopy. The photocatalytic activity was evaluated by measuring the degradation rate of methylene blue under UV light irradiation. All the films exhibit columnar morphologies. Increasing the O-2/TTIP ratio from 97:3 to 98.5:1.5 in the plasma leads to an increase in the column size and the amount of anatase phase. Meanwhile the photocatalytic activity was also improved. Then keeping the same O-2/TTIP ratio of 98.5:1.5, the substrate temperature was decreased even lower than 80 degrees C by pulsing the plasma with the duty cycle of 50%, which allows the deposition on the polystyrene substrate. In this pulsed mode, the column size is reduced, and the bottom layer (around 0-200 nm) near the substrate contains less anatase phase, but as the thickness increased, the anatase phase can be gradually enhanced in the upper layer (around 200-300 nm). Moreover, these films grown in the pulsed mode at low temperature (< 80 degrees C) present a high photocatalytic activity which indicates the film upper layer plays a more significant role in the photodegradation of methylene blue.

Low Temperature Deposition and Characterization of TiO2 Photocatalytic Film Through Cold Spray

Formation of TiO2 photocatalyst through cold spraying

Low-Temperature Preparation of Ag-TiO2 Composite Films and Their Properties

Photocatalytic Properties of TiO<sub>2</sub> Coatings Prepared by Cold Spray Process

Structural and Hydrophilic Properties of TiN Films Prepared by Ultrasonic Atomization Assisted Spray Method under Low Temperature

Characterization of Microstructure of Nano-TiO2 Coating Deposited by Vacuum Cold Spraying

Preparation of TiO2 Photocatalyst by Thermal Spraying with Liquid Feedstock

Preparation of TiO2 films under low temperature condition on the glass substrate

Oxidation Conditions of Ti and Photocatalysis of TiO2 Ceramic Films

Low-Temperature Deposition of Anatase Thin Films on Titanium Substrates and Their Abilities to Photodegrade Rhodamine B in Water

The Study on the Preparation of Titanium Dioxide Thin Film by Liquid Phase Deposition Method

Research Progress of Cold Sprayed Ti and Ti Alloy Coatings

Influence of Annealing on Photocatalytic Performance and Adhesion of Vacuum Cold-Sprayed Nanostructured TiO 2 Coating

Nanostructure and Photocatalytic Properties of TiO2 Films Deposited at Low Temperature by Pulsed PECVD

TEM Analysis of Photocatalytic TiO2 Thin Films Deposited on Polymer Substrates by Low-Temperature ICP-PECVD

Influences Of Agglomeration Powder Preparation On Deposition Of Cold-Sprayed Ti2alc Coating

Influence of Annealing Treatment on the Photocatalytic Performance of the Nanostructured TiO2 Coating Deposited by Vacuum Cold Spray

Photocatalytic performance and microstructure of thermal-sprayed nanostructured TiO2 coatings

Low-Temperature Synthesis of Nanostructured TiO2 Particles and Their Photocatalytic Oxidation Activity

TEM Characterization of the Coating-Substrate Interface in Vacuum Cold-Sprayed Nano-TiO2 Coating

Low-Temperature Preparation of Macroporous Anatase TiO2 Thin Film and Its Photocatalytic Activity