Abstract:Lead zirconate titanate (PZT) thin films were fabricated by adding 15 mol.% excess of Pb to the starting solution and spin coating onto Pt/Ti/SiO2/Si and Ir/IrO2/SiO2/Si substrates. The effect of bottom electrodes on the microstructures, crystalline phases and electrical properties of the PZT thin films was investigated. It was found that the films deposited on Pt/Ti bottom electrode consisted of perovskite phase without pyrochlore phase, whereas the films deposited on the Ir/IrO2 bottom electrode consisted of mainly perovskite phase with a small amount of pyrochlore phase. Bottom electrodes were also found to influence the preferred orientation and microstructure as well as the surface morphology of the PZT films. The Pt/Ti bottom electrode favored a (100) orientation and fine-grained structure as well as a smooth surface, whereas the Ir/IrO2 bottom electrode favored a random orientation, non-uniform structure and rough surface. High-resolution electron microscopy observation reveals that there is an intermediate layer of IrO2 at the PZT/Ir interface. This indicates that the intermediate layer of IrO2 influenced the orientation and microstructure of the PZT films on the Ir/IrO2 bottom electrode. Ferroelectricity was investigated by observing the polarization hysteresis loops. The remanent polarization and saturation polarization of the PZT films on the Ir/IrO2 bottom electrode were smaller than those of the PZT films on the Pt/Ti bottom electrode. The difference between the dielectric and the ferroelectric properties in these PZT films was correlated to their crystalline phases and microstructure.

Dependence of the properties of compositionally graded Pb(Zr,Ti)O3 ferroelectric films of the bottom electrode

Preparation, structure and characteristics on compositionally graded Pb(Zrx, Ti1-x)O3 ferroelectric thin films

Preparation and Properties of Pb(Zr, Ti)O3 Ferroelectric Thin Films and Compositionally Graded Thin Films on LaNiO3/Si Substrates

PREPARATION AND STUDY ON COMPOSITIONALLY GRADED Pb(Zr,Ti)O3 FERROELECTRIC THIN FILMS

Influence of different bottom electrodes to microstructure and electrical properties of Pb(Zr0.52Ti0.48)O3 ferroelectric films

The Tunability and Dielectric Properties of the Compositionally Graded Ba(Zr X Ti 1− X )O 3 Thin Films

Dielectric Enhancement and Ferroelectric Anomaly of Compositionally Graded (pb, Ca)TiO3 Thin Films Derived by a Modified Sol–gel Technique

Dielectric and Ferroelectric Performance of Pb(Zr(x)Ti(1-x))O3 Thin Films with Compositional Gradients

Properties of Compositionally Graded BiScO3–PbTiO3Thin Films Fabricated by a Sol–Gel Process

Combined Effect of Preferential Orientation and Zr/Ti Atomic Ratio on Electrical Properties of Pb(ZrxTi1−x)O3 Thin Films

Preparation and Study on Epitaxial Pb(Zr0.52ti0.48)O-3 Ferroelectric Films on Different Substrates

Effect of Bottom Electrodes on Microstructures and Electrical Properties of Sol–gel Derived Pb(Zr0.53 Ti0.47)O3 Thin Films

Composition Gradient Optimization And Electrical Characterization Of (Pb, Ca)Tio3 Thin Films

The Microstructure Characteristics and Dielectric Behaviors of the Compositionally Graded Ba(Ti,Sn)O-3 Thin Films

Ferroelectric And Pyroelectric Properties Of Highly (110)-Oriented Pb(Zr0.40ti0.60)O-3 Thin Films Grown On Pt/Lanio3/Sio2/Si Substrates

Structure and Ferroelectric Properties of Pzt Thin Film Deposited on Lanio3 Bottom Electrodes

Compositionally Graded Ba1-Xsrxtio3 Ferroelectric Thin Films Layer-By-Layer Deposited By Pulsed Laser Abalation

Ferroelectric properties of highly (111)-oriented Pb(Zr1−x, Tix)O3 thin films with different Zr/Ti ratios

Microstructure and dielectric properties of compositionally-graded (Ba1−xSrx)TiO3 thin films

Electric Fatigue Properties of Pb(Zr,Ti)O-3 Thin Films Grown on Lanio3 Buffer Pt/Ti/Sio2/Si Substrate by Metalorganic Chemical Vapor Deposition

Growth and Ferroelectric Properties of Sol-Gel Derived (pbla) Tio3 Films on Metallic Lanio3-Coated Substrates