AN AUTOMATIC MEASUREMENT SYSTEM WITH LANGMUIR ELECTRO STATIC PROBE FOR THE PLASMA SOURCE BASED ON FPGA

史磊,陈俊芳,符斯列,杨春林,黄孟祥,赖秀琼,张洪滨
2008-01-01
Abstract:An overall scheme and hardware implementation of an automatic measurement system with a static probe for the plasma source based on FPGA are presented.In this system,microvolt amplifying circuit module and isolation amplifying circuit module are used in external circuits to improve the exactitude of plasma diagnosed,and overcome separate disturbance effectively.Controlling and processing signal are described by Verilog HDL,and it's carried out in Cyclone series FPGA.The density of plasma and electron temperature of the quartzose pipe was measured under the power of 200W,the discharge pressure of 0.25 Pa,the excitation frequency of 13.56 MHz.
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