Transmission Efficiency and Vacuum Performance Study of Glass Capillary Array

蒋新亭,周洪军,霍同林,郑津津,钟鹏飞
2009-01-01
Abstract:Transmission efficiencies of glass capillary array in different ratios of length to diameter were researched in the spectral regions of VUV and soft X-ray by use of spectral radiation standards and metrology station(U26) in NSRL,and its vacuum differential performance was also researched.The experiment data were presented.When the beam incident angle is zero,single capillary's inside diameter is 134 μm,the calculated transmission efficiency of the glass capillary array for two different lengths,7 mm(L/D=52.2) and 19 mm(L/D=141.8) is the same,about 61%,while the actually measured transmission rate is about 44% and 24%,respectively.When the higher pressure side of the glass capillary array is set at 120 Pa,the pressure on the other side is 7.6×10-2 Pa when it is pumped with TMP-110 system,which shows the differential capacity is 1.6×103 times.
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