Electrical performance characterization of glass substrate for millimeter-wave applications

Tian Yu,Daquan Yu
DOI: https://doi.org/10.1007/s10854-022-09583-x
2023-01-15
Abstract:This paper reports the electrical transmission performance characterization of glass substrate for millimeter-wave (mm-W) application. Glass is a competitive material for mm-W applications for the property of excellent electrical performance, high integration density and low-cost. Here we design and fabricate glass-based test vehicles on 6-inch AF32 glass wafer, and then we measured test vehicles and characterized transmission performance of glass substrate. Firstly, the complex permittivity of AF32 substrate is characterized by MRR method. Next, the three most representative transmission for mm-W application, microstrip (MS), coplanar waveguide (CPW) and substrate in waveguide (SIW) line, are investigated by L-2L method. Besides, the transmission performance of through glass via (TGV) is studied by comparison of transmission line with and without TGV transition. At frequency of 80 GHz, the measured insertion loss of MS, CPW and SIW is 0.25, 0.22 and 0.12 dB/mm, and the measured insertion loss of TGV is 0.558 dB/via. The results of glass-based transmission lines and performance comparison with other mm-W substrate technologies indicate that glass substrate is promising for mm-W applications.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
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