Epitaxial Growth of Ferroelectric Ba1−xSrxTiO3thin Films for Room Temperature Tunable Microwave Devices

CL Chen,J Shen,SY Chen,Z Zhang,GP Luo,WK Chu,CW Chu
DOI: https://doi.org/10.1080/00150190108016255
2001-01-01
Ferroelectrics
Abstract:Abstract This paper will review the recent progress of the Texas Center for Superconductivity concerning the epitaxial growth of ferroelectric Ba1−xSrxTiO3 thin films on various substrates using pulsed laser ablation. Microstructure studies from X-ray diffraction and electron microscopy suggest that the as-grown films on (001) LaA103 and (001) MgO are c-axis oriented with excellent single crystallinity. The Rutherford Back-Scattering Spectroscopic studies indicate that the films have excellent epitaxial behavior. Microwave property measurements showed that the room temperature dielectric constant could be tuned up to 33% at 2.33 V/μm applied electric field. The coupled microwave phase shifter has achieved a phase shift of over 200° at 23.675 GHz and a figure of merit of about 55°/dB at room temperature. These results demonstrate that the epitaxial Ba1-xSrxTiO3 thin films are close to becoming used in the practical applications for the wireless rf communications.
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