Applications of Silicon Nanowires Functionalized with Palladium Nanoparticles in Hydrogen Sensors

Z. H. Chen,J. S. Jie,L. B. Luo,H. Wang,C. S. Lee,S. T. Lee
DOI: https://doi.org/10.1088/0957-4484/18/34/345502
IF: 3.5
2007-01-01
Nanotechnology
Abstract:Silicon nanowires (SiNWs) modified by palladium (Pd) nanoparticles were investigated for hydrogen detection. SiNWs were fabricated via a thermal evaporation method using tin (Sn) as the catalyst. The as-grown SiNWs were chemically treated to remove surface oxide and then coated with a thin layer of Pd nanoparticles. A gas sensor device was fabricated with the Pd-functionalized SiNWs. The sensor showed better sensitivity to hydrogen and faster responding time than the macroscopic Pd wire hydrogen sensor.
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