On-axis sputtering fabrication of Tm3Fe5O12 film with perpendicular magnetic anisotropy
Marlis Nurut Agusutrisno,Christopher H. Marrows,Kunihiro Kamataki,Takamasa Okumura,Naho Itagaki,Kazunori Koga,Masaharu Shiratani,Naoto Yamashita
DOI: https://doi.org/10.1016/j.tsf.2023.140176
IF: 2.1
2024-01-01
Thin Solid Films
Abstract:Thulium iron garnet, Tm3Fe5O12 with perpendicular magnetic anisotropy is fabricated using an on-axis sputtering technique followed by annealing, whereas previous reports have used unusual off-axis geometries. Stoichiometric Tm3Fe5O12 is obtained after the modification of the deposition conditions involving the position of the substrate relative to the cathode, which affects both the chemical and structural properties. The effective perpendicular magnetic anisotropy of 8.6 kJ/m3 is well in line with the results of previous studies using pulse laser deposition and off-axis sputtering. A maze domain pattern is observed, and the domain-wall energy is evaluated as 0.69 mJ/m2.
materials science, multidisciplinary,physics, applied, condensed matter, coatings & films