Research of Feed Control System for Linear Motor Based on PMAC

宋涛,张清泉,张勇,安晨辉,张飞虎
DOI: https://doi.org/10.3969/j.issn.1003-5451.2009.05.007
2009-01-01
Abstract:A full closed loop control is adopted based on PMAC(programmable multi-axis controller), making the system a good dynamic performance, achieving a micro-displacement of 50nm and limiting the fluctuation of the rate of speed around 1%, which proves the high performance of the system both in high accuracy and low speed stability.A machining experiment is done on an ultra-precision machine driven by the feed control system, achieving a surface roughness of Ra3.3nm at the feed speed of 20μm/s, which proves that this system is fit for the feed control of ultra-precision machine.
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