Abstract:Large aperture multilayer dielectric grating （MDG） is one of the key elements of high-power laser systems. In order to meet the requirements for large aperture MLG in a high-power laser system, a diffraction efficiency measurement system is developed for characterizing the diffraction efficiency of large MDG at 1064 nm and Littrow mounting. Through analyzinge the main factors such as detector signal-to-noise ratio and operating staff, which influence the testing results during measurement, their difference is obtained to be less than ±1%, which proves that the method can be used to measure the diffraction efficiency of MDG. Based on a large number of experimental data, the optical characterization of MDG in a negative first-order Littrow configuration could provide some information about grating microstructure. So the diffraction efficiency measurements have a number of important applications in the fabrication process, as a nondestructive grating inspection tool, such as determining the suitable photoresist grating mask which meet the ion beam etching requirements, on line end-point detection during ion beam etching, and judging whether another etching is needed. Based on above techniques, a number of MDGs have been achieved, each of which has mean diffraction efficiency greater than 95% line density 1740 lines/mm, and aperture up to 430 mm×350 mm. The results show that this method can satisfy the requirements for simple operation, testing speediness and preciseness, in which any inspection is not necessary for the MDG microstructure paramters.

Quasi-Dammann grating with proportional intensity of array spots for surface hardening of metal

Single-row laser beam with energy strengthened ends for continuous scanning laser surface hardening of large metal components

Algorithm Optimization and Mask Data Generating for Dammann Gratings in Laser Medical Applications

Quasi-Dammann Grating with Proportional Intensity Array Spots.

Design of Off-angle Beaming Device Based on Subwavelength Metal Thin Film Microstructure

Design of a High-Efficiency Multilayer Dielectric Diffraction Grating with Enhanced Laser Damage Threshold

Design and Fabrication of 64×64 Spot Array Dammann Grating

High-Power Diode Laser Surface Transformation Hardening of Ferrous Alloys

Effect of distribution status of the spot matrix on tensile behavior for 42CrMoV when conducting discrete laser surface strengthening: Based on experiment and simulation

Metal/multilayer-dielectric Coated Grating for Chirped Pulse Amplification Laser System

High-efficiency Metallic Diffraction Gratings for Laser Applications.

Method for Fabricating Large-Area Gratings with a Uniform Duty Cycle Without a Spatial Beam Modulator

Diffraction Efficiency Measurement of Large Aperture Multilayer Dielectric Grating and Its Application in the Fabrication Process

Laser-conditioning on multilayer dielectric gratings

Phase-Type Quantum-Dot-Array Diffraction Grating

Ion Beam Etching for Multilayer Dielectric Pulse Compressor Gratings with Top Layers of Hfo2

The Design, Fabrication and Performance of A Large Area 10000 Line/Mm Metal Transmission Diffraction Gratings for Soft X-Ray

A Comparative Study of High-Power Diode Laser and CO2 Laser Surface Hardening of AISI 1045 Steel

Quasi-continuous-wave laser directed energy deposition on inclined NV E690 steel plates: Melt pool and temperature evolution

All-silicon Nanorod-Based Dammann Gratings.

Fabrication of broadband, high-efficiency, metal-multilayer-dielectric gratings