Research of Small Displacement Measuring Based on PSD

ZENG Wei,CHEN Pei-feng,LI Chao
DOI: https://doi.org/10.3969/j.issn.1672-3392.2006.02.015
2006-01-01
Abstract:A new optical displacement measurement system is introduced with nanometric accuracy. It combines PSD and modern computer technology. By using the multi-reflection of laser between two plane mirrors, the displacement of measuring mirror in nanometers can be magnified to the degree that can be distinguished with PSD in micrometers which can be handled easily by common methods. As compared with common interferometer, the structure of this system is simpler and its stability is stronger. The experimental results are in agreement very well with the theoretical analysis. Experiment indicates this system can accomplish magnified measuring of small displace, and measuring precision reaches 11. 5 nm.
What problem does this paper attempt to address?