Progress of SAW hydrogen sensor

Jun-jing ZHOU,Chen-bo YIN,Shan-dong TU,Sonnleithner Daniel
DOI: https://doi.org/10.3969/j.issn.1000-9787.2007.03.001
2007-01-01
Abstract:The research on surface acoustic wave(SAW) hydrogen sensor is mainly focused on its sensitivity,response time,endurance,time stability and how to eliminate the affection of temperature.One method to realize these is to improve the performance of the sensitive film,and the other is to change the structure of the sensor.The progress of the research is overviewed,and the prospect is predicted.
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