Method of the Multi-electrode Array Fabricated

Peng Yage,Tian Hailong,Ma Yujun

DOI: https://doi.org/10.3969/j.issn.1007-1865.2012.18.029

2012-01-01

Abstract:Multi-electrode array is a basis for design and fabrication of electrochemical biosensor array.Four methods of multi-electrode array fabricated are reviewed extensively.The current problems of multi-electrode array are briefly discussed.

What problem does this paper attempt to address?

Electrochemical Biosensor Arrays for Multiple Analyte Detection

Debashis Sen,Robert Lazenby

DOI: https://doi.org/10.1002/anse.202300047

2023-09-22

Analysis & Sensing

Abstract:The simultaneous detection of multiple analytes using electrochemical biosensor arrays has demonstrated significant potential in various fields, including medical diagnostics. These platforms are designed to be low‐cost, easy to use, and offer fast detection of a range of molecules. This concept article discusses the components necessary to achieve multiplexing with electrochemical biosensor arrays. The various methods used to fabricate electrode arrays of different types are discussed. Furthermore, the methods for the selective immobilization of multiple different bioreceptors onto individual electrodes within the array, a crucial step essential for conferring specificity to the analytical processes, are presented with relevant examples. We have focused on enzymes, antibodies and aptamers as examples of bioreceptors that have been deployed in various multianalyte electrochemical detection platforms. Finally, we discuss the key challenges associated with their application for the analysis of real samples and provide a future outlook on possible strategies that can be used to overcome these challenges.
Current Development of Miniature Electrochemical Sensors

邹绍芳,门洪,王平

DOI: https://doi.org/10.3969/j.issn.1004-1699.2004.02.040

2004-01-01

Abstract:With various microfabrication techniques have been broadly employed for electrochemical sensors, miniature sensors are rapidly advancing in electrochemical analysis. Miniature sensors allow for low-cost production in batch processes, need only a small amount of sample solution, reduce the consumption of toxic reagents, decrease the environmental pollution, enable relatively rapid, reliable and inexpensive field-analysis. Low detection limits in the parts per billion level were obtained in determination of heavy metal ions. This review describes current development of miniature electrochemical sensors and their arrays, mainly introduces the characteristics of different structure of mercury film, carbon/graphite, noble metals microsensors and several representative sensor microfabrication methods: etching, lift-off, metal-masking and screen-printing, which usually combined with each other during application. Coupled with stripping voltammetry, miniature electrochemical sensors appear very promising in biomedical, food and environmental monitoring.
Electrochemical Detection for Arrayed Electrode Chips

Xu Danke,Chen Hongyuan

2009-01-01

Progress in chemistry

Abstract:Ananlytical chemistry for life science is an interdisciplinary scientific field to develop novel analytical principles, methods and techniques for detecting chemical molecules and providing scientific data and information for life science. Combining electrochemical methods with microarray technology, electrochemical biochips are being developed acceleratedly towards integration, throughput, miniaturization, automation. Recent progress in the development of electrochemical detection methods for DNA arrays and protein arrays as well as aptamer arrays are summarized in this review. In the case of electrochemical DNA arrays, numerous fabrication methods of DNA capture probes for high throughput and focused DNA arrays are presented. Electrochemical detection is focused on voltammetry by using various electrochemical probes or label-free approach. The development of arrayed electrodes immobilized with antibodies and aptamers is also discussed, in which voltammetry and electrochemical impedance measurements have been used to assay multiplexed protein targets.
Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer

Huai-Yuan Chu,Tzu-Ying Kuo,Baowen Chang,Shao-Wei Lu,Chuan-Chin Chiao,Weileun Fang

DOI: https://doi.org/10.1016/j.sna.2006.02.010

2006-01-01

Abstract:A novel method has been developed for the manufacture of a three-dimensional multi-electrode array (3D MEA), particularly, the shape of micro-tips can be varied by MEMS technology to construct different multi-electrode array. It improved the disadvantage of single electrode, which meant that it was available for multi-recording and analysis of a series of signals. Overcoming the difficulty of making interconnection line on 3D MEA chips via innovative fabrication process design. Using local isolation and removal of oxide films to forming electrodes and interconnections with oxide isolation covers. A 10×10 3D MEA with a distance of 100μm between each other for further bio-neural signals was demonstrated, and a test on rabbit retina was also available. Besides, integrating pre-amplifier and built-in resistors with 3D MEA was brought out to hopefully increase the efficiency of sensing.
Characterization of on-Chip Three-Microelectrode-System Array

ZHOU Jia,CHEN Hua,HUANG Yi-ping,BAO Min-hang

DOI: https://doi.org/10.3969/j.issn.1671-4776.2007.07.103

2007-01-01

Abstract:On-chip three-microelectrode-system arrays with square and disc working electrodes were designed and fabricated.The electrode dimensions ranged from 100~ 900 μm while the distances between the working electrodes and the counting electrodes were from 50~200 μm.The arrays were characterized by cyclic voltammetry in the presence of the redox probe ferrocenemethanol.The study results provide practical data for the optimization of such on-chip three-electrode-system arrays' design in the future.
Nanoelectrode Ensembles and Arrays

Cao Lixin,Yan Peisheng,Sun Kening

2008-01-01

Progress in chemistry

Abstract:As an assembled nanostructure, nanoelectrode ensembles (NEEs) or arrays (NEAs) present many advantages such as enhanced mass transport, lower double layer charging current, short time constant, lower electrolyte voltage drop, higher ratio of signal to noise, as well as good maneuverability, with high sensitivity and reliability in electroanalysis. Therefore, they have found broad applications in a variety fields including the study of electrochemical theory, biosensor, electrocatalysis and electrode materials in high energy chemical batteries. So far, researchers have tried various methods to made many NEEs (NEAs) with different materials and shapes, such as disk, cylindrical, conic, interdigitated and recessed well NEEs ( NEAs). The developed ingenious fabrication methods might be systematically classified as template synthesis, etching and self-assembly. NEEs ( NEAs) are characterized by electron microscopy and electrochemistry method. In this paper, the fabrication methods, characterization techniques and applications of NEEs ( NEAs) are reviewed according to some of our work and the reported literatures so far. The main problems and trends in the development and study of NEEs (NEAs) are discussed and prospected.
Development of the three dimensional multi-electrode array for neural recording

huaiyuan chu,tzuying kuo,weileun fang,b chang,shaowei lu,chuanchin chiao

DOI: https://doi.org/10.1109/SENSOR.2005.1497444

2005-01-01

Abstract:A novel method has been developed for the manufacture of a three dimensional multi-electrode array (3D MEA), particularly, the shape of micro-tips can be varied by MEMS technology to construct different multi-electrode array. It improved the disadvantage of single electrode, which meant that it was available for multi recording and analysis of a series of signals. Overcome the difficulty of making interconnection line on 3D MEA chips via innovative fabrication process design. Use local isolation and removal of oxide films to forming electrodes and interconnections with oxide isolation covers. A 10×10 3D MEA with a distance of 100 μm between each other for further bio-neural signals was demonstrated, and a test on rabbit retina was also available. Besides, integrating pre-amplifier and built-in resistors with 3D MEA was brought out to hopefully increase the efficiency of sensing.
Fabrication of Microelectrode Arrays Using Microcontact Printing

HX He,QG Li,ZY Zhou,H Zhang,SFY Li,ZF Liu

DOI: https://doi.org/10.1021/la000635b

IF: 3.9

2000-01-01

Langmuir

Abstract:Geometrically defined gold microelectrode arrays are fabricated, in which a self-assembled monolayer of hexadecylmercaptan acts as passivation layer and is region-selectively formed by microcontact-printing (mu CP). By use of differently designed stamps in the mu CP procedure, the dimension of individual microelectrode and the pitch between in the microelectrode array can be easily controlled. The prepared microelectrode arrays are characterized by scanning force microscopy and cyclic voltammetry. The results demonstrate that the cross-talk between the individual microelectrodes, which causes current shielding effect, directly correlates the arrangement and the size of the microelectrodes in the arrays. This is in good agreement with the standard microelectrode theory.
Micorfabrication of Miniature Electrode Array along Micro Channels

Ying Wu,Yongqing Jiang,Wenjing Hu,Zhaoying Zhou

DOI: https://doi.org/10.1109/wcica.2006.1713633

2006-01-01

Abstract:Miniature electrode together with micro channels on silicon substrate has potential application in MEMS (micro electromechanic system) field. The PN junction of silicon substrate gave the limitation on the formation of miniature electrode. Discussing this limitation resulted from PN junction and taking advantage of MEMS techniques, the design and fabrication of polycrystalline silicon electrode array at the both sides of micro channels on the silicon substrate was put forward. The V-I curve between the adjacent electrodes of electrode array shows that the influence of PN junction is reduced and the electrode array can provide electrical field for some separation chip, which may give a new idea to the integration design of LOC (laboratory on the chip)
High-Throughput Single-Entity Electrochemistry with Microelectrode Arrays

Sasha E. Alden,Lingjie Zhang,Yunong Wang,Nickolay V. Lavrik,Scott N. Thorgaard,Lane A. Baker

DOI: https://doi.org/10.1021/acs.analchem.4c01092

IF: 7.4

2024-05-24

Analytical Chemistry

Abstract:We describe micro- and nanoelectrode array analysis with an automated version of the array microcell method (AMCM). Characterization of hundreds of electrodes, with diameters ranging from 100 nm to 2 μm, was carried out by using AMCM voltammetry and chronoamperometry. The influence of solvent evaporation on mass transport in the AMCM pipette and the resultant electrochemical response were investigated, with experimental results supported by finite element method simulations. We also describe the...

chemistry, analytical
Microelectrode Array Fabrication by Micro-Wedm

Y. K. Wang,Z. L. Wang,M. S. Li,W. L. Zeng,M. H. Weng

DOI: https://doi.org/10.4028/www.scientific.net/amr.69-70.79

2009-01-01

Advanced Materials Research

Abstract:In the paper, in order to overcome machining limits in throughput and precision because of positioning error and tool wear of a single tool electrode, a method for the microelectrode array fabrication by micro-WEDM is described and assessed. Characteristics of the microelectrode array fabrication by micro-WEDM, such as machining open voltage, pulse peak current, discharge duration and servo feed rate so on, are investigated through a series of experiments. A 10 10 squared electrode array is machined by micro-WEDM and the width of each squared electrode is about 40µm. The microelectrode array with good quality is obtained by applying decreased open voltage and peak current, increased discharge duration and optimized machining speed. Then micro hole-array is processed by applying obtained electrode array in micro-EDM method. The diameter of each squared hole in the array is about 50 µm due to appropriate control strategy that per micro pulse energy is decreased and periodic jump-down is applied during the machining process. Experiments have demonstrated that the combination process of microelectrode array fabricated by micro-WEDM and micro-hole array done by micro-EDM is a novel method of process which makes it more feasible and efficient to fabricate microelectrode array and high-density hole-array.
Fabrication of Parylene-Based Flexible Microelectrode Arrays

RUI Yue-feng,WANG Ya-jun,LIU Jing-quan,YANG Chun-sheng

DOI: https://doi.org/10.3969/j.issn.1672-6030.2011.05.008

2011-01-01

Abstract:In neural engineering,microelectrode arrays are the interfaces between nervous system and external electronic circuits.Their performance determines the effects of signal acquisition and stimulation of the whole nervous system.A Parylene-based hemispherical flexible microelectrode array was proposed.The microelectrode arrays were fabricated by photoresist melt technology and MEMS technology.The hemispherical morphology can ensure good contact between microelectrode and tissue,and will increase surface area to the double size compared with planar microelectrodes with the same bottom area which is helpful in decreasing interface impedance and power consumption.Experimental results showed that the interface impedance of the hemispherical microelectrodes decreased by 55% compared with planar microelectrodes whose bottom area is 1.3 times larger than that of the hemispherical microelectrodes,and the interface impedance varied with the contact area of microelectrodes and tissue caused by different dimensions of opening on the top of the microelectrodes.Comsol was used to simulate the current density of microelectrodes.Simulation results showed that the current density also varied with the opening dimension.Current density of microelectrode can be adjusted by adjusting the opening dimension at the top of microelectrode so as to meet the needs of different parts of tissue.
Novel sinuous band microelectrode array for electrochemical amperometric sensing

Yang Li,Shuqing Yin,Nan Jiang,Xinxin Li,Chong Liu,Jingmin Li,Yuanchang Liu

DOI: https://doi.org/10.1016/j.elecom.2021.107159

IF: 5.443

2021-12-01

Electrochemistry Communications

Abstract:Pursuing a higher response signal is the core challenge in improving the detection performance of a microelectrode-based amperometric electrochemical sensor. Band microelectrode arrays (bMEAs) are attractive due to their high response current and economical fabrication process. However, further amplifying the response current by arranging the array more compactly or increasing its size is generally hindered by the shielding effect or the restricted construction region. A novel array of sinuous band microelectrodes (sbMEA) is proposed, produced by deforming a bMEA by tilting and bending. Its response and diffusion characteristics are simulated and analyzed. The effects of structural parameters on its performance are revealed, and their optimal value is deduced. The simulation demonstrates that a sbMEA can generate a larger current than a MEA of traditional shape. Production of such a sbMEA does not involve any additional fabrication costs compared with a bMEA. Cyclic voltammetry (CV) tests with potassium ferrocyanide solution verify the theoretical performance of the sbMEA, and a 10% higher current was obtained compared to the corresponding bMEA.

electrochemistry
A novel screen-printed electrode array for rapid high-throughput detection.

Shuai Mu,Xiao Wang,Yuan-Ting Li,Yang Wang,Da-Wei Li,Yi-Tao Long

DOI: https://doi.org/10.1039/c2an35261c

2012-01-01

Abstract:A novel multi-channel electrode array sensing device was fabricated by screen-printing techniques using 96-well plate as the template. To confirm its practical value, we developed a one-step preparation of multi-walled carbon nanotubes (MWCNTs) doped electrode array by an ink containing MWCNTs, which was applied to the simultaneous detection of a variety of biological samples and environmental pollutants. Results demonstrated that the designed sensing device could carry out the multiple measurements of different analytes at the same time, while MWCNTs enhanced the electrocatalytic activity of electrodes toward electroactive molecules. The required amount of each sample was only similar to 200 mu L. Moreover, the excellent differential pulse voltammetric (DPV) response toward dopamine, hydroquinone and catechol was obtained and the detection limits was determined to be 0.337, 0.289 and 0.369 mu M, respectively. Comparing it with the traditional screen-printed electrode (SPE), this sensing device possesses the advantages of high-throughput, fast electron transfer rate for electrodes, short-time analysis and low sample consumption.
Recent Developments in the Design and Fabrication of Electrochemical Biosensors Using Functional Materials and Molecules

Young-Joon Kim,K. Theyagarajan

DOI: https://doi.org/10.3390/bios13040424

2023-03-28

Biosensors

Abstract:Electrochemical biosensors are superior technologies that are used to detect or sense biologically and environmentally significant analytes in a laboratory environment, or even in the form of portable handheld or wearable electronics. Recently, imprinted and implantable biosensors are emerging as point-of-care devices, which monitor the target analytes in a continuous environment and alert the intended users to anomalies. The stability and performance of the developed biosensor depend on the nature and properties of the electrode material or the platform on which the biosensor is constructed. Therefore, the biosensor platform plays an integral role in the effectiveness of the developed biosensor. Enormous effort has been dedicated to the rational design of the electrode material and to fabrication strategies for improving the performance of developed biosensors. Every year, in the search for multifarious electrode materials, thousands of new biosensor platforms are reported. Moreover, in order to construct an effectual biosensor, the researcher should familiarize themself with the sensible strategies behind electrode fabrication. Thus, we intend to shed light on various strategies and methodologies utilized in the design and fabrication of electrochemical biosensors that facilitate sensitive and selective detection of significant analytes. Furthermore, this review highlights the advantages of various electrode materials and the correlation between immobilized biomolecules and modified surfaces.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation
[The research on multi-layer flexible microelectrode arrays of epiretinal prosthesis].

Zheng Cao,Tianao Li,Xiaohong Sui,Gang Li,Qiushi Ren,Xinyu Chai

2010-01-01

Abstract:This paper proposed a new design on multi-layer flexible microelectrode arrays (MEA) of epiretinal prosthesis, as well as a set of automatic testing system to evaluate and analyze the MEA. Experiment results showed that the MEA was satisfying on both flexibility and impedance and the multi-layer design didn't introduce significant differences.
Fabrication of Flexible 3D Microelectrode Aray with Parylene-Based Pattern Transfer Technique

Xianju Huang,Renxin Wang,Wei Wang,Zhihong Li

DOI: https://doi.org/10.1109/sensor.2009.5285521

2009-01-01

Abstract:This paper describes a new three-dimension (3D) flexible parylene-based microelectrode array (MEA) developed for functional electrical stimulation in neural prosthesis. These arrays with 3D tip profile and gold surface were microfabricated employing a parylene-based pattern transfer technique. Silicon tip array was etched by the HNA etchant and covered with parylene hereafter. Metallization on this parylene structure was achieved by an aluminum-photoresist dual-layer lift-off process. Finally, this parylene-metal thin film was peeled off from the substrate. Electrical characteristic of this 3D electrode was numerically studied and compared with that of a conventional planar microelectrode. Electric field focusing of 3D electrode revealed its priority to the planar one. With easy fabrication process and excellent electrical performance, the present 3D microelectrode array will be a promising candidate for high-density stimulation applications.
Developing Microelectrode Arrays for the Point-of-Care Multiplex Detection of Metabolites

Yu-Chia Chang,Benoit Arnould,Jennifer M. Heemstra,Kevin D. Moeller

DOI: https://doi.org/10.1021/acs.analchem.4c02978

IF: 7.4

2024-08-27

Analytical Chemistry

Abstract:DNA-aptamer-functionalized electrode arrays can provide an intriguing method for detecting pathogen-derived exometabolites. This work addresses the limitations of previous aptamer-based pathogen detection methods by introducing a novel surface design that bridges the gap between initial efforts in this area and the demands of a point-of-care device. Specifically, the use of a diblock copolymer coating on a high-density microelectrode array and Cu-mediated cross coupling reactions that allow for...

chemistry, analytical
Fabrication and properties of 3D flexible parylene-based microelectrode array with silicon tips

Renxin Wang,Wei Zhao,Wei Wang,Zhihong Li

DOI: https://doi.org/10.1109/MEMSYS.2011.5734409

2011-01-01

Abstract:We have developed and characterized a novel 3D flexible parylene-based microelectrode array (MEA) with silicon tips, which combines advantages of the rigid 3d electrode and the flexible substrate. The impedance of solid 3D MEA in PBS solution is smaller than that of the planar and hollow 3D MEA. Further tests indicate that the solid 3D MEA has better penetrating performance, and retains previous structure and profile without observable damage after penetration.
Fabrication of an electrochemical biosensor array for simultaneous detection of L-glutamate and acetylcholine.

Yan Deng,Wei Wang,Chao Ma,Zhiyang Li

DOI: https://doi.org/10.1166/jbn.2013.1633

2013-01-01

Journal of Biomedical Nanotechnology

Abstract:Using two nano-porous pseudo carbon paste electrodes (Nano-PPCPEs) as the working electrodes, a saturated calomel electrode as the reference electrode, and a Pt electrode as the counter electrode to form a four-electrode system, a novel type of glutamate-acetylcholine electrochemical biosensor array was successfully fabricated. It was shown that the biosensor array displayed a high selectivity and sensitivity and the selective and simultaneous determination of glutamate and acetylcholine (ATCh) is feasible. For L-glutamate, a linear range from 5 x 10(-7) M to 1 x 10(-5) M with the detection limit of 2.5 x 10(-7) M was demonstrated, while for ATChl the linear range is from 5 x 10(-6) M to 2 x 10(-4) M with the detection limit of 1.5 x 10(-7) M. This research means a possibility to simultaneously detect more neurotransmitters with a nano-PPCPEs electrochemical biosensor array.

Method of the Multi-electrode Array Fabricated

Electrochemical Biosensor Arrays for Multiple Analyte Detection

Current Development of Miniature Electrochemical Sensors

Electrochemical Detection for Arrayed Electrode Chips

Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer

Characterization of on-Chip Three-Microelectrode-System Array

Nanoelectrode Ensembles and Arrays

Development of the three dimensional multi-electrode array for neural recording

Fabrication of Microelectrode Arrays Using Microcontact Printing

Micorfabrication of Miniature Electrode Array along Micro Channels

High-Throughput Single-Entity Electrochemistry with Microelectrode Arrays

Microelectrode Array Fabrication by Micro-Wedm

Fabrication of Parylene-Based Flexible Microelectrode Arrays

Novel sinuous band microelectrode array for electrochemical amperometric sensing

A novel screen-printed electrode array for rapid high-throughput detection.

Recent Developments in the Design and Fabrication of Electrochemical Biosensors Using Functional Materials and Molecules

[The research on multi-layer flexible microelectrode arrays of epiretinal prosthesis].

Fabrication of Flexible 3D Microelectrode Aray with Parylene-Based Pattern Transfer Technique

Developing Microelectrode Arrays for the Point-of-Care Multiplex Detection of Metabolites

Fabrication and properties of 3D flexible parylene-based microelectrode array with silicon tips

Fabrication of an electrochemical biosensor array for simultaneous detection of L-glutamate and acetylcholine.