Abstract:Lead zirconate titanate (PbZrxTi1-xO3, or PZT) is a piezoelectric material widely used as sensors and actuators. For microactuators, PZT often appears in the form of thin films to maintain proper aspect ratios. One major challenge encountered is accurate measurement of piezoelectric coefficients of PZT thin films. In this paper, we present a simple, low-cost, and effective method to measure piezoelectric coefficient d33 of PZT thin films through use of basic principles in mechanics of vibration. A small impact hammer with a tiny tip acts perpendicularly to the PZT thin-film surface to generate an impulsive force. In the meantime, a load cell at the hammer tip measures the impulsive force and a charge amplifier measures the responding charge of the PZT thin film. Then the piezoelectric coefficient d33 is obtained from the measured force and charge based on piezoelectricity and a finite element modeling. We also conduct a thorough parametric study to understand the sensitivity of this method on various parameters, such as substrate material, boundary conditions, specimen size, specimen thickness, thickness ratio, and PZT thin-film material. Two rounds of experiments are conducted to demonstrate the feasibility and accuracy of this new method. The first experiment is to measure d33 of a PZT disk resonator whose d33 is known. Experimental results show that d33 measured via this method is as accurate as that from the manufacturer's specifications within its tolerance. The second experiment is to measure d33 of PZT thin films deposited on silicon substrates. With the measured d33, we predict the displacement of PZT thin-film membrane microactuators. In the meantime, the actuator displacement is measured via a laser Doppler vibrometer. The predicted and measured displacements agree very well validating the accuracy of this new method.

Hydrostatic Piezoelectric Coefficient Dh of PZT Ceramics and PZN-PT and PYN-PT Single Crystals

Nanoscale Insight Of High Piezoelectricity In High-T-C Pmn-Ph-Pt Ceramics

Facile Preparation and Performance of Novel High-Tc Xbi(ni1/2ti1/2)o3-(1-x)pb(zr1/2ti1/2)o3 Piezoceramics

Crystal structure and actuation mechanisms in morphotropic phase boundary Pb(Zn 1/3 Nb 2/3 )O 3 ‐Pb(Zr 1/2 Ti 1/2 )O 3 piezoelectric ceramic

Pyroelectric Performance, Dielectric Response and Conductive Mechanism of BCHT Lead-Free Piezoelectric Ceramics Via Powder Injection Molding

Investigation on Microscopic Mechanisms of High-Curie Temperature PMN-PH-PT Piezoelectric Ceramics

Intrinsic piezoelectricity of PZT

Enhancing Electrical Properties of High-Curie Temperature Piezoelectric Ceramics BNT-PZT and Their Mechanism

Realization of face-shear piezoelectric coefficient d36 in PZT ceramics via ferroelastic domain engineering

Electromechanical properties of [001]‐textured Mn‐PMN‐PZT ceramics under hydrostatic pressure

Experimental research on dynamic mechanical properties of PZT ceramic under hydrostatic pressure

Phase structure and electrical properties of x PZN–(1− x )PZT piezoceramics near the tetragonal/rhombohedral phase boundary

Temperature and frequency dependent defect dipole kinematics in "hard" piezoelectric ceramics

Measurement of Transverse Piezoelectric Coefficients of Pb(Zr0.52Ti0.48)O3 Thin Films by a Mechano-electrical Multiphysics Coupling, Bulge Test Method

Measurements of Piezoelectric Coefficient d33 of Lead Zirconate Titanate Thin Films Using a Mini Force Hammer

Investigation of phase structure and electrical properties of PMN-PSN-PNN–PZT ceramics with different PNN content

Realizing the invariant electrostrain response and low hysteresis via multicomponent coordination in Pb‐based ceramics

Ultra‐high‐temperature piezoelectric responses and ultra‐high thermal stability of piezoelectricity in ceramic PbZr 0.54 Ti 0.46 O 3

Phase Transition and Piezoelectric Response under Electric Field in PMN-PT Crystals

Piezoelectric Charge Coefficient of Halide Perovskites

Enhanced Piezoelectric Properties of PZT Ceramics Prepared by Direct Coagulation Casting Via High Valence Counterions (DCC–HVCI)