Design and Simulation for the Electron Optical System of Micro-Beam X-ray Source

LIU Ji,FAN Yu-feng
DOI: https://doi.org/10.3969/j.issn.1002-8935.2008.05.008
2008-01-01
Abstract:A structure of micro-beam X-ray source electron optical system with field emission cathode is presented in this paper firstly.The system is simulated and analyzed by using numerical simulation.After structure optimizing,the micro-beam X-ray source electron optical system is obtained with emission current about 80 μA and focus radius about 3.2 μm.This structure is simple,small volume,and can be used as one of the choices for micro-beam X-ray source producing.
What problem does this paper attempt to address?