Phase-Locked Phase-Shifting Laser Diode Interferometer with Photothermal Modulation

T Suzuki,XF Zhao,O Sasaki
DOI: https://doi.org/10.1364/ao.40.002126
IF: 1.9
2001-01-01
Applied Optics
Abstract:We propose a phase-shifting interferometer that uses both phase-locked and photothermal modulating techniques. In this interferometer the measurement accuracy is not affected by the intensity modulation that usually appears in current modulation. The surface profile of a diamond-turned aluminum disk was measured; the rms repeatability obtained was lambda/460.
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