Abstract:Optical frequency combs of the femtosecond laser have been widely used in time-frequency technology and precision spectrum measurement. The absolute ranging technology derived from time-frequency characteristics of the optical frequency comb is expected to become the incomparable means of length metrology and distance measurement in the future due to its traceability to time-frequency standard and capability of large scale and high precision. This paper proposes a real-time absolute ranging method with multi-wavelength interferometry referenced to optical frequency comb, which enables multiple continuous-wave lasers to be synchronously calibrated to selected modes of the frequency comb by means of optical phase-locked loop. With synchronous phase measurement and calculation with excess fraction algorithm, absolute distance measurement by multi-wavelength interferometry is ultimately fulfilled. The proposed measurement method can not only retain high resolution and high accuracy of traditional laser interferometry, but also can be traced to a time-frequency reference, which is of metrological significance to high-precision length and distance measurement, especially to the definition of "meter" for physical reproduction. Measured results for ranging experiments have proved that the non-ambiguity range of the four-wavelength interferometer reaches 44.6 mm, and fluctuations of air refractive index cause the non-ambiguity range change with the order of nanometers. Through theoretical analysis, it is pointed out that the non-ambiguity range of the multi-wavelength interferometer in the actual measurement environment is restricted by the calculated error of air refractive index, especially the estimation accuracy and fluctuation degree of the refractive index relationship between wavelengths. And in a good laboratory conditions, the non-ambiguity range of real-time absolute ranging by frequency-comb-calibrated multi-wavelength interferometry can reach several meters or even tens of meters. At the same time, a 2-meter linear displacement comparison has been carried out, the P.V. value of the residual errors for linear fitting is 36.1 nm, and such residual errors match the magnitude of uncertainty of air refractive index calculated by empirical formula, which prove that the multi-wavelength interferometry can perform meter-level absolute ranging. The proposed research can be directly applied to precision manufacturing of large-scale semiconductors up to several meters, and is beneficial to promoting the accuracy of laser ranging for space mission.

Phase-shifting Interferometer Using a Frequency-Tunable Diode Laser Calibrated by an Optical Frequency Comb

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

Absolute Distance Measurement Using Frequency-Sweeping Heterodyne Interferometer Calibrated by an Optical Frequency Comb

Phase-shifting interferometry to determine the absolute diameter of a silicon sphere using a frequency-tunable diode laser

Frequency comb calibrated diode laser interferometry for absolute distance measurement

Digital Correction Method for Realizing a Phase-Stable Dual-Comb Interferometer

Femtosecond Laser-Based Phase-Shifting Interferometry for Optical Surface Measurement.

Interferometric diameter determination of a silicon sphere using a traceable single laser frequency synthesizer

Arbitrary Optical Frequency Synthesis Traced to an Optical Frequency Comb

Phase Shifting Interferometer of a Femtosecond Laser for Optical Surface Measurement

Sinusoidal phase-modulating self-mixing interferometer with nanometer resolution and improved measurement velocity range

Real-time Absolute Distance Measurement by Multi-Wavelength Interferometry Synchronously Multi-Channel Phase-Locked to Frequency Comb and Analysis for the Potential Non-Ambiguity Range

Synthetic Wavelength Interferometry of an Optical Frequency Comb for Absolute Distance Measurement.

Frequency-sweeping Interferometry Utilizing Optical Frequency Comb and Fourier Transform Phase Retrieving

Laser heterodyne interferometric signal processing method based on rising edge locking with high frequency clock signal.

On-the-fly precision spectroscopy with a dual-modulated tunable diode laser and Hz-level referencing to a cavity

Fourier transform-limited optical frequency-modulated continuous-wave interferometry over several tens of laser coherence lengths

High-precision frequency sweeping interferometry for absolute distance measurement using a tunable laser with sweeping range of 88 GHz

Comb-referenced Frequency-Sweeping Interferometry for Precisely Measuring Large Stepped Structures

Optical phase-shifting methods based on low coherence laser for large aperture Fizeau interferometer

Optical Phase Locking with a Large and Tunable Frequency Difference Based on a Vertical-Cavity Surface-Emitting Laser.