An Array Tactile Sensor With Piezoresistive Single-Crystal Silicon Diaphragm

Litian Liu,Xinyu Zheng,Zhijian Li
DOI: https://doi.org/10.1016/0924-4247(93)80151-6
1993-01-01
Abstract:This paper reports a 4 x 4 element array tactile sensor with 'silicon box' structure. The sensory elements of the tactile sensor are made of piezoresistive single-crystal silicon diaphragms. This sensor is fabricated by an Si-Si direct bonding technique and one-side processing technology fully compatible with current MOS technology. The array tactile sensor and CMOS signal-processing circuits are integrated on the same chip. The structure, circuit, processing and experimental results of the device are described in detail.
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