Design and Performance Test of Large-Stroke Vibration Isolation for a Hexapod Platform Actuator

Cui Long,Huang Hai

2009-01-01

Abstract:With the development of high-resolution optical device and laser equipment,the requirements for large stroke vibration isolation apparatus become higher and higher.Low frequency large amplitude vibration control is difficult to use passive vibration isolation method.Hence,a linear motor actuator was designed for large stroke hex-apod vibration isolation platform.This actuator has higher response speed and large thrust,and it can be use for large amplitude vibration isolation.Actuator performance test result shows that its positioning accuracy is above 1 micrometer,and its response frequency is above 50 Hz.Using adaptive inverse control method,we carried out 3 Hz ～ 20 Hz sine vibration isolation experiment.The result shows that the vibration isolation effect is above 20 dB.