Uniform, Axial‐Orientation Alignment of One‐Dimensional Single‐Crystal Silicon Nanostructure Arrays

KQ Peng,Y Wu,H Fang,XY Zhong,Y Xu,J Zhu
DOI: https://doi.org/10.1002/anie.200462995
2005-01-01
Angewandte Chemie
Abstract:Neatly scratching the surface: A facile etching technique assisted by a silver-nanoparticle network to produce large-area 1D silicon nanostructure arrays with desired orientation and doping characteristics is demonstrated (see picture). A mechanism for the highly selective etching is proposed on the basis of experimental evidence.
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