Research Progress of Solid-State Nanopores for the New DNA Detection Method

Chen Jian,Deng Tao,Wu Cinan,Liu Zewen

DOI: https://doi.org/10.3969/j.issn.1671-4776.2013.03.003

2013-01-01

Abstract:The research progress of the solid-state nanopores based on the third generation DNA detection method is reviewed,and the importance of the mass fabrication of the solid-state nano-pores with the conventional micro processing technology is pointed out.The solid-state nanopores fabrication and pore-size shrinking techniques are reviewed after a brief summary of the basic principle for the third generation DNA sequencing technology based on solid-state nanopores.The fabrication method of graphene nanopores is summarized as well.Nowadays,many methods are developed in fabricating nanopores,including the electron beam drilling,ion beam sculpting and anisotropic wet etching.The pore-size shrinking technique is the effective way to reduce the diameter of nanopores to sub-10 nm.Currentt shrinking technologies include the electron beam irradiation,ion beam irradiation,material deposition and direct thermal heating.Based on an analysis on the current researches,it is concluded that the mass production of solid-state nano-pores can be realized with the combination of the conventional micro-nano processing technology and the pore-size shrinking techniques,which presents divers advantages such as high efficiency, good repeatability and unique material selectivity.It is worth to carry out further study on this method.