Abstract:This work presents a facile chemical‐based strategy for creating centimeter‐scale, well‐defined nanoparticle arrays with single‐particle resolution. The approach enables precise fabrication, scalability, and transferability onto various substrates. The transfer process preserves chemical templates for subsequent replication‐transfer cycles. The method achieves exceptional positional accuracy and ultranarrow surface lattice resonances, offering new avenues for flexible and wearable devices. Nanoparticle (NP) arrays, particularly those with plasmonic properties, have diverse applications in electronics, photonics, catalysis, and biosensing, but their precise and scalable fabrication remains challenging. In this work, a facile chemical‐based strategy is presented for the fabrication of precise NP patterns using a combination of soft thermal nanoimprinting and template‐directed assembly. The approach enables the creation of well‐defined NP arrays with single‐particle resolution and yields over 99%, covering a diverse range of NP sizes from 30 to 150 nm. These patterns can be transferred onto various substrates including semiconductors, insulators, 2D materials, and flexible polymers, maintaining high uniformity and repeatability for over 60 cycles with minimal degradation. Moreover, the method enables the fabrication of extensive NP arrays up to 1 cm2 with a positional accuracy of ±11 nm for 30 nm NPs. As a result, the obtained silver NP arrays exhibit ultranarrow surface lattice resonances with a linewidth of 4 nm and a quality factor (Q) of 216. The method offers new avenues for the creation of plasmonic NP arrays for flexible and wearable devices.

Large-area and High-Density Gold Nanoparticle Arrays with Sub-10 Nm Gaps

Fabrication of Single Gold Particle Arrays with Pattern Directed Electrochemical Deposition.

A Method to Fabricate 2D Nanoparticle Arrays

Arbitrary Gold Nanoparticle Arrays Fabricated Through AFM Nanoxerography and Interfacial Seeded Growth

Fabrication of Ultrahigh-Density Nanowires by Electrochemical Nanolithography

Fabrication of High-Density and Superuniform Gold Nanoelectrode Arrays for Electrochemical Fluorescence Imaging

Fabrication of nanometer-spaced electrodes using gold nanoparticles

Sustainable Fabrication and Transfer of High‐Precision Nanoparticle Arrays Using Recyclable Chemical Pattern Templates

A large-area nanoscale gold hemisphere pattern as a nanoelectrode array.

Batch Fabrication of Gold-Gold Nanogaps by E-beam Lithography and Electrochemical Deposition.

Batch fabrication of gold–gold nanogaps by E-beam lithography and electrochemical deposition

Large Area Metal Nanowire Arrays with Submicron Pitch and Tunable Sub-20 Nm Nanogaps

Electrochemical Fabrication of Gold Electrode Pairs with Nanoscale Gap

Continuous High-Flux Synthesis of Gold Nanoparticles with Controllable Sizes: a Simple Microfluidic System

Large Area Metal Nanowire Arrays with Tunable Sub-20 Nm Nanogaps

Nanopatterned Assembling of Colloidal Gold Nanoparticles on Silicon

Solution-processible fabrication of large-area patterned and unpatterned gold nanostructures.

Site-Selective Assemblies of Gold Nanoparticles on an AFM Tip-Defined Silicon Template

Particle Lithography-Based Patterning of Polyelectrolyte Template Films and Their Application in Fabrication of Gold/silver Nanoparticle Assembly.

Electrochemical Deposition of Silver Nanoparticle Arrays with Tunable Density.

Large-area 2D gold nanorod arrays assembled on block copolymer templates.