Abstract:A uniform array of single-grain Au nanodots, as small as 5-8 nm, can be formed on silicon using e-beam lithography. The as-fabricated nanodots are amorphous, and thermal annealing converts them to pure Au single crystals covered with a thin SiO2 layer. These findings are based on physical measurements, such as atomic force microscopy (AFM), atomic resolution scanning transmission electron microscopy, and chemical techniques using energy dispersive x-ray spectroscopy. A self-assembled organic monolayer is grafted on the nanodots and characterized chemically with nanometric lateral resolution. We use the extended uniform array of nanodots as a new test-bed for molecular electronics devices.

What problem does this paper attempt to address?

The key problem that this paper attempts to solve is how to fabricate uniform and precisely - arranged sub - 10 - nm single - crystal gold nanoparticle arrays by electron - beam lithography (e - beam lithography), and study the physical and chemical properties of these nanoparticles under different conditions. Specifically, this research mainly focuses on the following aspects: 1. **Size control of nanoparticles**: - By adjusting the electron - beam dose and the number of pixels, precise control of the nanoparticle size has been achieved, enabling the diameter of the nanoparticles to vary between 5 and 50 nm. - It has been found that when the size of the nanoparticles is less than 15 nm, they are composed of a single crystal grain; when the size is greater than 15 nm, they are composed of multiple crystal grains. 2. **Crystal structure transformation of nanoparticles**: - The initially prepared nanoparticles are amorphous, but through appropriate thermal annealing treatment (for example, annealing at 260 °C for 2 hours), these amorphous nanoparticles can be transformed into single - crystal gold nanoparticles. - During the thermal annealing process, Au atoms diffuse to the silicon surface and form a silicon oxide layer (SiO₂), and this process has an important impact on the final structure and performance of the nanoparticles. 3. **Application potential of nanoparticles**: - Research shows that these sub - 10 - nm single - crystal gold nanoparticles can be used as electrodes in molecular electronic devices, especially for studying the electrical properties of organic self - assembled monolayers (SAMs). - These nanoparticles can also serve as a test platform for developing new molecular electronic devices, especially for the study of metal - molecule - metal (MMM) junctions at the nanoscale. 4. **Chemical analysis and molecular functionalization**: - The researchers also demonstrated how to use high - angle annular dark - field scanning transmission electron microscopy (HAADF - STEM) and energy - dispersive X - ray spectroscopy (EDX) for chemical analysis at the nanoscale to characterize the molecules adsorbed on the nanoparticles (such as ferrocenyl - hexanethiol molecules). In summary, this paper aims to explore the potential applications of gold nanoparticles in molecular electronics and other nanotechnology fields by precisely controlling their size and crystal structure, and to provide new experimental methods and technical means for future research.

Large array of sub-10 nm single-grain Au nanodots for use in nanotechnology

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