Preparation and Characterization of Mesoporous Thin Films of Titanium Dioxide

熊帮云,毛亮亮,何春清
DOI: https://doi.org/10.14188/j.1671-8836.2012.03.001
2012-01-01
Abstract:Mesoporous titania thin films with tunable pores were prepared by spin-coating precursor sols on polished Si wafers. The precursor sols were synthesized via a sol-gel method using titanium tetrachloride and amphiphilic triblock copolymer F38 as the precursor of backbone and the structure template, respectively. The dependence of the morphology of nanoporous TiO2 thin films on the mass ratio of the polymeric template was studied. The poresity of the films was found to increase with the increase of the ratio of template. With further increasing the mass ratio of F38/ (F38+TiC14) up to about 15%, the pore percolation occurred; and the mesopores were highly interconnected in a worm-like shape in a film from more polymeric template. The influence of annealing on the lattice structure of TiOz thin film was also investigated. Upon annealing (600-800 ℃) for 4 hours, the TiO2 films were in anatase phase with good thermal stability; whereas, mixed crystallinites of anatase/rutile were found in the mesoporous TiO2 film after isochronal annealing 600 ℃.
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