Research Progress of Nanocrystalline-Silicon Thin-Film Cold Cathodes

HE Fang,HU Wen-bo
DOI: https://doi.org/10.3969/j.issn.1002-8935.2012.06.009
2012-01-01
Abstract:Nanocrystalline-silicon thin-film cold cathode is a type of planar field emission cathode mainly consisted of massive nanometer-sized crystalline silicon particles covered by a ultra-thin oxide layer.They have potential applications in the field of vacuum nano-electronic devices and electron beam devices due to their simple structure,low operating voltage,insensitivity to the ambient pressure and good electron-emission direction.This article describes the structure,the electron emission mechanism,the fabrication technique,the research progress and the development trend of nanocrystalline-silicon thin-film cold cathodes.
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