Box 8: Sample Preparation For Transmission Electron Microscopy Using A Focused Ion Beam

Lumin Wang,Yongqi Fu
DOI: https://doi.org/10.1007/978-3-642-00623-4_21
2009-01-01
Abstract:The most common conventional preparation techniques for cross-sectional transmission electron microscope (TEM) samples are a combination of mechanical grinding, polishing, and ion milling. These techniques suffer from the fact that they are very time consuming and that it is extremely difficult to do site-specific cross-sections. Conventional ion-milling techniques for TEM specimen preparation are essentially site blind, even with the so-called precision ion polishing systems (PIPS). Thus, it is left to chance whether the specimen detail of interest is thin enough for TEM-imaging. Even if subsequent ion milling of TEM specimens is possible in extending the thin areas, it is a tedious and mostly uncontrolled procedure. Because continuous high-resolution control of the ion milling process is not possible, the specimen areas of interest may easily be destroyed.
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