Study on CD Stamper flatness measurement based on single chip system

Chen Liqiang,Wang Lin,Wu Binchu
DOI: https://doi.org/10.3969/j.issn.1000-372X.2006.03.006
2006-01-01
Applied laser
Abstract:This paper presents a flatness-measuring instrument for CD Stamper.The instrument is based on quadrant detector、single chip system and A/D transform circle.Computer process the measured data with the Visual Basic and Matlab program.Thus,an automatic measurement for flatness of the CD Stamper is carried out.
What problem does this paper attempt to address?