Abstract:Piezoelectric actuators (PEA) have been widely used in the ultra-precision manufacturing fields. However, the hysteresis nonlinearity between the input voltage and the output displacement, which possesses the properties of rate dependency and multivalued mapping, seriously impedes the positioning accuracy of the PEA. This paper investigates a control methodology without the hysteresis model for PEA actuated nanopositioning systems, in which the inherent drawback generated by the hysteresis nonlinearity aggregates the control accuracy of the PEA. To address this problem, a neural network self-tuning control approach is proposed to realize the high accuracy tracking with respect to the system uncertainties and hysteresis nonlinearity of the PEA. First, the PEA is described as a nonlinear equation with two variables, which are unknown. Then, using the capabilities of super approximation and adaptive parameter adjustment, the neural network identifiers are used to approximate the two unknown variables automatically updated without any off-line identification, respectively. To verify the validity and effectiveness of the proposed control methodology, a series of experiments is executed on a commercial PEA product. The experimental results illustrate that the established neural network self-tuning control method is efficient in damping the hysteresis nonlinearity and enhancing the trajectory tracking property.

Adaptive Output Feedback Control for Piezoactuator-driven Stage

Adaptive Output Feedback Control with Feedback-Feedfoward Compensator for Piezoactuator-Driven Stages

Precision control of piezoelectric actuator using support vector regression nonlinear model and neural networks

Precision Control of A Piezo-Actuate System Using Fuzzy Sliding-Mode Control with Feedforward Predictor-Based Compensation

Prandtl-Ishlinskii Model-Based Adaptive Feedforward Control for Piezoelectric-Stack-actuator-driven Systems

Haar Wavelet Fat-Based Adaptive Controller With Self-Tuning Fuzzy Compensation For A Piezoelectric-Actuated System Control

A Deep Serial Model and Predictive Control for Piezo-actuated Positioning Stages

Adaptive control of an amplified piezoelectric-driven micropositioning stage based on notch filter structure inspiration and neural network online tuning

Neural Network Self-Tuning Control for a Piezoelectric Actuator

Adaptive Robust Repetitive Control of Piezoelectric Actuators

Model-Free Adaptive Sensing and Control for a Piezoelectrically Actuated System

Fat-Based Adaptive Sliding-Mode Control For A Piezoelectric-Actuated System

Robust Adaptive Backstepping Control for Piezoelectric Nano-Manipulating Systems

Direct adaptive neural control for precision piezoelectric actuator without hysteresis compensation

Modeling and Single Neuron Adaptive Pid Control of Flexible Piezoelectric Cantilever Beam

Modeling and Control of a Linear Piezoelectric Actuator

Adaptive Robust Precision Motion Control of a Piezoelectric Positioning Stage

Study on ECNLP Dynamics Model of Piezoceramic Actuator and Position Tracking Controller

A neural network-based model predictive controller for displacement tracking of piezoelectric actuator with feedback delays

Feedback linearization and equivalent-disturbance compensation control strategy for piezoelectric stage

Memory-Enhanced Neural Network Control of Piezoelectric Actuators With a Rate-Amplitude-Dependent Hysteresis Model