Phase-Shifting Interferometry for Measurement of Movement Attitude

Zhenyu ZHU,Xing FU,Huafeng LI,Dongmei REN,Ji WANG
DOI: https://doi.org/10.3969/j.issn.1674-5795.2011.01.009
2011-01-01
Abstract:In response to the demands for movement attitude measurements,an angle measurement method based on phase-shifting interferometry has been developed for accurate measurement of movement attitude.An experimental system for measuring three-axis angle with two phase-shifting interferometers is established,the resolution of which for angle measurement is better than 0.006″.The attitude change of micro-displacement table is measured while the table moves,and measurement results of table rotation around three axes are obtained.Measurement results of this system are compared with those of a small angle laser interferometer,and the maximum deviation is 0.03″.The angle measurement method based on phase shifting interferometry is proved to be able to achieve high precision measurements of attitude in motion.
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