Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe
Liang Yu,Xingyang Feng,Pengcheng Hu,Xionglei Lin,Tao Jing
DOI: https://doi.org/10.3390/mi14122221
IF: 3.4
2023-01-01
Micromachines
Abstract:The development of high-precision satellites has increased the demand for ultraprecision three-degrees-of-freedom (3-DOF) angle measurements for detecting structural deformation. The required instrument should simultaneously measure pitch, yaw, and roll angles using a single reference point. This paper proposes a 3-DOF angle measurement method based on the wavefront interference principle, and a mathematical model and its decoupling algorithm were built. Then, an angle-sensing probe with an extremely simple structure was designed and constructed. Finally, a series of experiments were performed to verify the method’s feasibility. The experiment results showed that the roll, pitch, and yaw measurement resolution of the probe was better than 10, 1, and 1 μrad, respectively, providing a high-performance 3-DOF angle measurement with a single probe. The short-term stabilities of roll, pitch, and yaw were better than 22, 1.7, and 2.0 μrad, respectively.