A Line Array of Microplasma Devices With Coplanar Electrodes Operating in Argon

Ling-Guo Meng,Hai-Feng Liang,Chun-Liang Liu,Zhi-Hu Liang
DOI: https://doi.org/10.1109/TPS.2008.2002915
IF: 1.368
2008-01-01
IEEE Transactions on Plasma Science
Abstract:A line array of microplasma devices with coplanar electrodes has been fabricated, and the discharge characteristics of the microplasma devices under different argon pressures were investigated in experiments which were driven by sinusoidal voltage and alternating pulse voltage, respectively. The microcavities of the proposed device are composed of two coplanar electrodes instead of dielectric or s...
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