Range Profiles of 50 to 400 Kev Hg+ in Quartz Crystal

KM WANG,XJ LIU,YH WANG,JT LIU,HY GUO,BR SHI
DOI: https://doi.org/10.1016/0375-9601(87)90169-1
IF: 2.707
1987-01-01
Physics Letters A
Abstract:Range profiles of Hg+ implanted at energies from 50 to 400 keV in quartz crystal are measured by MeV 4He+ Rutherford backscattering. The measured projected ranges and range stragglings are compared with the Biersack theory. The result shows that the agreement between the experimental and calculated values is quite good for the projected ranges; after including second order energy loss terms, a better agreement for the range straggling is obtained.
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