Six-DOF Microstage Thermal Analysis and Cooler Design

LI Guang,ZHANG Ming,ZHU Yu,DUAN Guanghong,Masayoshi Tomizuka
DOI: https://doi.org/10.3969/j.issn.1001-2265.2011.03.001
2011-01-01
Abstract:The rising temperature is a significant factor to influence the microstage precision and environment.There is an important way to improve the microstage performance,which is derived from thermal analysis to achieve the microstage optimization design.This paper presents a new type of 6-degree-of-freedom nanometer precision microstage structure.The microstage heat source was given,and the effective thermal conductivity of the stator coil,the water and natural conditions convection heat coefficient of the surface was calculated.Furthermore,the microstage mathematical model of three-dimensional temperature field was established.According to the heat transfer theory,the microstage stator coil temperature field theory calculation was completed.Calculated by the numerical method,the microstage three-dimensional temperature distribution in the natural convection and water cooling conditions was obtained.According to the calculation and analysis,a novel powerful cooler is designed.The results show that after the water-cooled,the microstage mover temperature rises less than 1℃.The precision request was satisfied.
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