CO2 Foaming in Thin Films of Block Copolymer Containing Polydimethylsiloxane (PDMS) Blocks

ZHANG Zhi-hong,HONG Yan-zhen,CHEN Cai-kang,LI Lei
DOI: https://doi.org/10.3321/j.issn:1000-7555.2009.09.043
2009-01-01
Abstract:Isolated nanocells were prepared in a poly(styrene-b-dimethylsiloxane) block copolymer film by scCO2 foaming. The embedded nanocellular structures can be exposed by reactive ion etching (RIE) and characterized by atomic force microscopy (AFM) and scanning electronic microscopy (SEM). Such cells may be formed by coalescence of the neighboring PDMS nano-domains during the process. The resultant nanocells have a density of 7.0×1010/cm2 and an average diameter of 20 nm. The fabrication of more complex structures using the same method but with different block fractions is currently under investigation.
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