A Micro-Feed Actuator for Ultra-Precision Grinding of Brittle Materials

X. Y. Gang,De Qing Mei,Zi Chen Chen
DOI: https://doi.org/10.4028/www.scientific.net/KEM.259-260.725
2004-01-01
Abstract:The fracture mechanism of brittle materials changes to plastic deformation when the grinding depth is controlled as small as several nanometers, surface finishes similar to those achieved in polishing or lapping is produced. A magnetostrictive micro-feed actuator made of Terfenol-D has been developed to realize ductile-grinding of brittle materials. Both numerical results and experiments show the excellent displacement-output performance of this actuator.
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