Abstract:In order to improve the spatial resolution of a confocal system, a radial birefringent pupil filter (RBPF) is introduced into a differential confocal system. RBPF consists of two polarizers with a birefringent element between them, and its pupil function is deduced from Jones matrix. The thickness and curvature radius of RBPF are optimized independently, using the first zero coordinate ratio. The pupil function is modulated by RBPF to enhance the half-width of the response function, and lateral resolution is improved when response curve is changed with the position of RBPF as well as the polarization; then axial super-resolution of the system can be guaranteed using differential confocal detection mechanism. In comparison with conventional pupil filtering technology, RBPF features high lateral resolution and can be easily produced; moreover, it also has a simple structure. Together with its low cost, RBPF provides a new way for the improvement of super-resolution of confocal system. It is indicated from theoretical analysis and preliminary experiments that the lateral resolution can be significantly improved and the measurement error is reduced by 76nm when measuring a standard grating of period 3μm; the axial resolution up to 3nm has been achieved using the optimized pupil filter. In addition to its application for measurement of a small irregular surface in a limited space, the whole differential confocal system proposed can be fitted onto a coordinate measuring machine for non-contact measurement of dimensions and surface roughness.

Differential Confocal Optical System Using Gradient-Index Lenses

An optical system incorporating gradient-index lens for confocal inspection

High-accuracy Differential Autofocus System with an Electrically Tunable Lens.

A Confocal Probe With Gradient Index Lens

A small probe with a gradient index lens for confocal measurement

A lateral differential confocal microscopy for accurate detection and localization of edge contours

Compact Chromatic Confocal Lens with Large Measurement Range

Nano-Displacement Measurement Based On Virtual Pinhole Confocal Method

Axial Nanodisplacement Measurement Based on Astigmatism Effect of Crossed Cylindrical Lenses.

Measurement of Miniature Cavities Using a Confocal Microscopy with a Gradient-index Lens

Micro Detection System with nm Resolution Using Self-focal Confocal Microscope

Dynamic Confocal Optical Probe Based on Time Difference Measurement

The Optical Probe Using Differential Confocal Technique For Surface Profile

Differential internal multi-reflection method for nano-displacement measurement

Digital Differential Confocal Microscopy Based on Spatial Shift Transformation.

Differential confocal technology based on radial birefringent pupil filtering principle

Differential Confocal Microscopy with A Wide Measuring Range Based on Polychromatic Illumination

Optical focus detection system with nanometer resolution using differential confocal microscope

Differential Confocal Optical Probes with Optimized Detection Efficiency and Pearson Correlation Coefficient Strategy Based on the Peak-Clustering Algorithm

A Data Processing Method Based on Tracking Light Spot for the Laser Differential Confocal Component Parameters Measurement System

Fiber-coupled Chromatic Confocal 3D Measurement System and Comparative Study of Spectral Data Processing Algorithms