Microanalysis of Post-Irradiation of Ions into Carbon Films on Tungsten Substrates

HL Zhang,DZ Wang,NK Huang
DOI: https://doi.org/10.1016/s0257-8972(99)00166-8
1999-01-01
Abstract:Carbon films were prepared by radio-frequency magnetron sputtering on tungsten substrates. The effect of post-irradiation (40keV, 4×1017ionscm−2) with active nitrogen ions and inert argon ions was studied. The results show that combined irradiation with these two kinds ions can transform the carbon film into a carbide film due to induced mixing effects. X-ray diffraction and X-ray photoelectron spectroscopy were used to obtain information on the phases, composition and chemical states of elements at the specimen surface.
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