Temperature Control System for High Temperature Oxidation Diffusion Furnace
Yang Yibo,Wang Chunhong,Zhu Yu,Zhang Mingchao
DOI: https://doi.org/10.3969/j.issn.1003-353X.2009.01.025
2009-01-01
Abstract:A hardware and software system for a high temperature oxidation diffusion furnace based on the technical demand was introduced.The hardware system was composed by a multi-channel switch,an industrial computer,a temperature transmitter,and I/O cards.Based on this hardware system the algorithm of the PID tuning was improved,and the trajectory planning algorithm was introduced.Finally,this system functions were fulfilled of the control,ramp,PID auto-tuning and automatic temperature distribution.The experiments show that this system achieves the technical requirement for oxidation diffusion and the system augment ability,stability and precision are improved.This system is already applied in high temperature oxidation diffusion furnace.