Abstract:This paper describes a facile approach to the site-specific growth of single-walled carbon nanombes (SWNTs) on silicon surfaces by chemical vapor deposition (CVD). The approach is based on the use of a surfactant as a resist to define patterns of silicon oxide nanodomains onto which nanoparticles of iron hydroxide (Fe(OH)A 1-5 nm diameter, could be deposited. In base growth mode, the SWNTs can grow from the oxide nanodomains. By controlling the location of oxide nanodomains, site-specific growth could be obtained. The iron hydroxide nanoparticles were prepared by hydrolysis of ferric chloride (FeCl3). Patterned hydroxylated silicon oxide nanodomains were created by scanning probe oxidation (SPO) of silicon substrates modified with aminopropyltrimethoxysilane (APTMS, H2N(CH2)(3)Si(OCH3)(3)). Due to electrostatic interaction, Fe(OH)(3) nanoparticles can be selectively deposited on hydroxyl groups present on silicon oxide nanodomains. To inhibit the assembly of the nanoparticles on a APTMS-coated silicon surface, sodium dodecyl sulfate (SDS) was introduced, which restricted deposition to the hydroxylated nanodomains. A model mechanism for. the selective deposition mechanism has been proposed. It was possible to convert the patterned Fe(OH)3 nanoparticles to iron oxide, which served as a catalyst for the site-specific growth of SWNTs. Raman spectroscopy and AFM were used to characterize the nanotubes on the Si substrate. This will offer the possibility for future integration with conventional microelectronics as well as the development of novel devices.

Effect of Fe Metal on the Growth of Silicon Oxide Nanowires

Ultrafast growth of single-crystalline Si nanowires

Catalytic growth of α-FeSi2 and silicon nanowires

Metallic and Ionic Fe Induced Growth of Si−SiOx Core−Shell Nanowires

Silica-assisted catalytic growth of oxide and nitride nanowires

In situ catalytic growth of Al2O3 and Si nanowires

A simple method to synthesize Si3N4 and SiO2 nanowires from Si or Si/SiO2 mixture

Growth of multi-walled carbon nanotubes on Si substrate with Fe3O4/DR film as catalyst precursors

Growth of SiC nanowires/nanorods using a Fe–Si solution method

Synthesis of Single-Crystalline Fe Nanowires Using Catalyst-Assisted Chemical Vapor Deposition

Sulfide-assisted Growth of Silicon Nano-Wires by Thermal Evaporation of Sulfur Powders

Selective Synthesis of Fe 2 O 3 and Fe 3 O 4 Nanowires Via a Single Precursor: A General Method for Metal Oxide Nanowires

Characterization of Fe Nanorods Grown Directly from Submicron-Sized Iron Grains by Thermal Evaporation

Fe2O3/SiO2 Nanowires Formed by Hydrothermally Transforming SiO2 Spheres in the Presence of Fe3+: Synthesis, Characterization, and Catalytic Properties

GROWTH CARBON NANOTUBES DIRECTLY ON PRISTINE SILICON SUBSTRATES

Comparison between Copper and Iron as Catalyst for Chemical Vapor Deposition of Horizontally Aligned Ultralong Single-Walled Carbon Nanotubes on Silicon Substrates

The synthesis of metal oxide nanowires by directly heating metal samples in appropriate oxygen atmospheres

Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe<sub>2</sub>O<sub>3</sub>Nanobelts and Nanowires

Surfactant-resisted assembly of Fe-containing nanoparticles for site-specific growth of SWNTs on Si surface.

Monte Carlo Study for the Growth of Alpha-Fe2o3 Nanowires Synthesized by Thermal Oxidation of Iron.

Vacuum Electron-Beam Evaporation of Fe Nanocrystals on Si 3 N 4 Buffer Layer for Carbon Nanotube Growth