Thermal desorption study of deuterium on Si(100) surface

Hu Ji-huang,Chen Ke-ming,Hu Xin-gen,Zhuang Cheng-qun,Wang Xun
DOI: https://doi.org/10.1088/0256-307X/2/4/002
1985-01-01
Chinese Physics Letters
Abstract:The thermal desorption spectra study of deuterium on Si(100) surface shows that two adsorption states the monodeuteride phase and the dideuteride phase can be formed. The activation energies of desorption for these two phases have been measured and a comparison with the hydrogen adsorption on Si(100) surface has been made.
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