Abstract:This paper proposes a bulk micromachined bandpass filter on 0.5mm-thick Pyrex glass, whose operation is based on the splitting of the odd and even degenerate mode in a dual-mode resonator, with the addition of a perturbation element. In such a way, a filter may require only half resonators of a traditional one, resulting in a more compact configuration over those ever reported. A 4%-bandwidth bandpass filter centered at 17GHz was designed. The square-ring-like coplanar waveguide (CPW) act as a dual-mode resonator, and an open-circuited stub attached to the inner corner of the square-ring acts as the perturbation element and dominates the filter bandwidth. The two bulk-micromachined switches for tuning are placed symmetrically along the diagonal line. Since the electrical length of CPW is extended after being loaded by capacitive switches, both the degenerate resonating frequencies and the filter mid-band frequency are shifted downward. Theoretical formulas are derived for various actuation states of all the switches. The filter performance is analysed also using finite-element fullwave tools. A frequency shift of 0.6GHz is seen which is close to 0.58GHz obtained from analytical solutions. Both the original and tuned state come with satisfying microwave performance, i.e. low passband insertion-loss (< 0.5dB) and return-loss (< −15dB) and high stopband rejection. It is also shown that the simulated result is in good agreement with theoretical solutions. The bulk microfabrication is shown to be much simpler than surface micromachining conventionally used for RF MEMS switches. Since the bridge skeleton is Si, thermal mismatch between all-metal bridge and dielectric substrate is avoided, and reliability at elevated temperature is guaranteed or at least greatly improved. Besides, the p++ doped Si line patterned simultaneously with the microbridges, can also be used as a DC biasing resistor, which can eliminate the additional steps to fabricate the resistive alloy line. The tested results of the fabricated switch samples are also shown. The device may be a good candidate for novel Ku-band inter-scientific satellite communication or wireless networking.

Tunable Microstrip Rectangular Ring Bandpass Filter

A Miniaturized Dual‐mode Zeroth‐order Ring Bandpass Filter with One Left‐handed Unit and a Capacitive Stub

Extended Doublet Bandpass Filters Implemented with Microstrip Resonator and Full-/Half-Mode Substrate Integrated Cavities

A CMOS 1.3-1.7GHz Q-Enhanced LC Band-pass RF Filter with 1.5-67% Tunable Fractional Bandwidth

Microwave Linear-phase Microstrip Filters Using Ring Resonators

Novel microstrip bandpass filter with multiple transmission zeros and wide stopband

A New Wide Stopband Microstrip Bandpass Filter with Miniaturized Interdigital Capacitor Resonator

Miniaturized left-handed CPW bandpass filter using split ring resonator

A Flat-Passband Microstrip Filter With Nonuniform- $Q$ Dual-Mode Resonators

Tunable and configurable photonic microwave bandpass filter implemented in a radio-over-fiber link

A triple-mode ring dielectric resonator band-pass filter using substrate integrated waveguide (SIW)

High-Selective Bandpass Filters Based on New Dual-Mode Rectangular Strip Patch Resonators

Bandwidth and Wavelength Tunable Optical Passband Filter Based on Silicon Multiple Microring Resonators.

A Bulk Micromachined Tunable Dual-Mode Microwave Bandpass Filter on Coplanar Waveguide

A 10&#x2013;14 GHz RF MEMS Tunable Bandpass Filter

Dual-band bandpass filter using centrally coupled resonators (CCRs)

Bandwidth and Center Wavelength Tunable Micro-Ring Optical Filter with Vernier Effect by Four Spectrum Combination

A Fully Tunable Filter With Wide Range Notch Frequency Tuning And Bandwidth Switchable

Scalable Bandwidth-Tunable Micro-Ring Filter Based on Multi-Channel-Spectrum Combination

A 12–16 GHz microelectromechanical system-switchable bandpass filter

Design of high selectivity tunable bandpass filter with switchable single‐/dual‐band responses