Key Techniques of Ultra-precision Cutting of Microstructure Surface

杨元华,陈时锦,段耀凯,程凯

DOI: https://doi.org/10.3969/j.issn.1003-5451.2007.03.002

2007-01-01

Abstract:Ultra-precision cutting of microstructure surface can offer many capabilities which other methods don't have. The key techniques of it was summarized. The difficulties and developing trends of this field were presented.

What problem does this paper attempt to address?

The Ultra-precision Machining Technology and It' Domestic and International Progress

Yong He

2001-01-01

Abstract:In this paper the range,machining method and system structure of the ultra-precision machining technology are discussed. Some key problems for improving accuracy of the ultra-precision machining are discussed deeply.As viewed from machining accuracy,the domestic and international developing trends and goals are analyzed.
An Overview of Ultra-Precision Diamond Machining of Microstructured Freeform Surfaces

LI Rongbin,KONG Lingbao,ZHANG Zhihui,DU Xue,CHEN Xin,LIU Qiang

DOI: https://doi.org/10.3901/jme.2013.19.144

2013-01-01

Journal of Mechanical Engineering

Abstract:The development of ultra-precision machining technology, including ultra-precision machining equipment and the single point diamond cutting mechanism, is reviewed and summarized. Micro-engineering technology used in the production of microstructured freeform surfaces is introduced. The ultra-precision diamond cutting process for these microstructured freeform surfaces is elucidated, including single point diamond turning(SPDT), fast tool servo(FTS) machining, diamond micro chiseling(DMC), as well as ultra-precision raster milling. Challenges for measuring microstructured freeform surfaces are discussed, including contact and non-contact measuring methods. Case studies on the fabrication and characterization of some typical microstructured freeform surfaces are presented. Finally, the development of ultra-precision machining equipment in China and the future trends in the machining and measurement of microstructured freeform surfaces are discussed.
Studies on the Surface Quality of the Unsteady-State Grinding Technique

YS Xu,J Hu,B Lin,ZC Li

DOI: https://doi.org/10.1016/s0924-0136(02)00659-3

IF: 6.3

2002-01-01

Journal of Materials Processing Technology

Abstract:Ultra-precision grinding for advanced ceramics has been achieved by the unsteady-state grinding technique. This paper deals mainly with observing and analyzing the surface quality of silicon nitride ground by a pink fused alumina wheel with different grinding parameters. To optimize the grinding parameters in the process of unsteady-state grinding, experiments of X-ray diffraction, energy spectrum analysis, SEM observation and roughness measurement were performed. The results show that there do exist optimum grinding conditions such as grain size, coolant, and cutting depth, etc. Finally, the surface roughness Ra can be as good as 0.01μm under optimum conditions.
Ultra-precision Machining Technology Based on Laser Trapping

王晓娜,郭天太,白剑

DOI: https://doi.org/10.3969/j.issn.1001-3881.2009.07.015

2009-01-01

Abstract:To supply a novel tool for machining,laser trapping was applied in machining,the concept of ultra-precision machining technology based on laser trappingwas presented,and its basic working principle and theoretical model were discussed.The feasibility of machining technology based on laser trapping was validated through a practical example.The machining technology based on laser trapping will play important role in the future.
Review on the progress of ultra-precision machining technologies

Julong Yuan,Binghai Lyu,Wei Hang,Qianfa Deng

DOI: https://doi.org/10.1007/s11465-017-0455-9

IF: 4.063

2017-06-01

Frontiers of Mechanical Engineering

Abstract:Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracy and surface quality. As more research findings are published, such technologies now involve complicated systems engineering and been widely used in the production of components in various aerospace, national defense, optics, mechanics, electronics, and other high-tech applications. The conception, applications and history of ultra-precision machining are introduced in this article, and the developments of ultra-precision machining technologies, especially ultra-precision grinding, ultra-precision cutting and polishing are also reviewed. The current state and problems of this field in China are analyzed. Finally, the development trends of this field and the coping strategies employed in China to keep up with the trends are discussed.

engineering, mechanical
Special Techniques in Ultra-Precision Machining

Li,Min Xu,Chen Dong,Wang JunHua

DOI: https://doi.org/10.1117/12.782948

2007-01-01

Abstract:As the development of ultra-precision machining, the SPDT (single point diamond turning) was applied for the manufacture of a variety of optical components for its high precision, versatility and lower manufacturing cost. Whereas, the improvement of ultra-precision machining is not only related to the most topnotch equipments in the world but also closely linked to the special techniques in the ultra-precision Machining. Therefore, the industrialization and marketization of the ultra-precision machining will not be realized without these special techniques. This paper introduces the principle, trait and application of some important special techniques which can match the SPDT efficaciously, they are FTS, STS, SSS, ACT, VQ, LADT and UADT techniques.
Ultra-Precision Manufacturing Technology for Difficult-to-Machine Materials

Qi Liu,Mingjun Chen,Jian Cheng,Xichun Luo

DOI: https://doi.org/10.3390/ma16124322

IF: 3.4

2023-06-12

Materials

Abstract:Ultra-precision manufacturing requires superior components with an impeccable surface finish and accuracy [...]

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
A review of molecular dynamics simulation in studying surface generation mechanism in ultra-precision cutting

Junhong Han,Yanbing Chen,Jianpeng Wang,Guoqing Zhang,Haitao Wang

DOI: https://doi.org/10.1007/s00170-022-09936-0

2022-08-26

Abstract:Molecular dynamics (MD) simulation, an atomic simulation technique, plays a significant role in studying mechanism of ultra-precision cutting. MD simulation of nanometric cutting with extremely high cutting speeds involves considerable computational time and significant memory usage, which can provide microscopic analysis to better understand the ultra-precision cutting process. Considerable researches relating to MD simulation might help improve manufacturing technologies, which are of particular interest to early studies. However, a number of studies embracing ultra-precision cutting with MD simulation have not been reviewed systematically before, especially for the surface generation mechanism. In this paper, the principles and fundamentals, the development and application, and advantages and current limitations of MD simulation of surface generation mechanism in ultra-precision cutting are reviewed. Relevant MD simulation studies of surface generation mechanism are summarized with a focus on (a) the minimum cutting thickness; (b) the effect of tool geometry parameters: rake angle, edge radius; (c) the influence of cutting parameters: feed rate, cutting depth and cutting speed; (d) the influence of cutting force and cutting temperature; (e) the effect of crystal orientation. This paper provides a brief review of surface generation mechanism in ultra-precision cutting with the MD simulation to preliminary understand MD simulation and how it applied in studying nanosurface generation mechanism.

engineering, manufacturing,automation & control systems
Editorial for the Special Issue on Ultra Precision Technologies for Micromachining, Volume II

Yukui Cai,Xichun Luo,Jining Sun,Wenlong Chang

DOI: https://doi.org/10.3390/mi13111975

2022-11-15

Abstract:With the increasing demand for ultra-high-precision products and micro-products in fields such as aerospace, national defense, military, transportation, and people's livelihoods, it has become an important development trend in the field of machining to realize ultra-high-precision machining and miniaturization with a higher level and higher quality [...].
<strong>Presentation Title: Ultra-precision machining and measurement of optical microstructures </strong>

Lingbao Kong

DOI: https://doi.org/10.3390/optofluidics2017-04436

2017-01-01

Abstract:This talk will give a systematic study for the ultra-precision machining technology for generating various optical microstructures, such as micro V-groove for optical fiber connectors, microlens array for microfluidic microcavity, etc. which includes the machining mechanism, tool path generation, modeling and simulation of surface generation, machining error prediction, process optimization, etc. A series of methods and approaches are also presented to measure and characterize such optical microstructures. The research work aims to provide an enabling solution for producing optical microstructures in high precision and efficiently.
Precision Cutting Technology of Solar Wafer and Characteristic Research

Feng LIN,Jian-ping WANG,Jian-zhong FU

DOI: https://doi.org/10.3969/j.issn.1003-5451.2010.01.004

2010-01-01

Abstract:On the basis of the current solar wafer cutting technology and its characteristics,the numerical control ultrasonic vibration cutting solar wafer technology was presented to provide a practical method of processing for the precision cutting of solar wafer.
Ultra-Precision Machining: Cutting With Diamond Tools

D. A. Lucca,M. J. Klopfstein,O. Riemer

DOI: https://doi.org/10.1115/1.4048194

2020-10-05

Journal of Manufacturing Science and Engineering

Abstract:Abstract This article is written as a tribute to Professor Frederick Fongsun Ling 1927–2014. Single-point diamond machining, a subset of a broader class of processes characterized as ultraprecision machining, is used for the creation of surfaces and components with nanometer scale surface roughnesses, and submicrometer scale geometrical form accuracies. Its initial development centered mainly on the machining of optics for energy and defense related needs. Today, diamond machining has broad applications that include the manufacture of precision freeform optics for defense and commercial applications, the structuring of surfaces for functional performance, and the creation of molds used for the replication of a broad range of components in plastic or glass. The present work focuses on a brief review of the technology. First addressed is the state of current understanding of the mechanics that govern the process including the resulting forces, energies and the size effect, forces when cutting single crystals, and resulting cutting temperatures. Efforts to model the process are then described. The workpiece material response when cutting ductile and brittle materials is also included. Then the present state of the art in machine tools, diamond tools and tool development, various cutting configurations used, and some examples of diamond machined surfaces and components are presented. A discussion on the measurement of surface topography, geometrical form, and subsurface damage of diamond machined surfaces is also included.
Development of ultra-precision machining technology

W. Lee,W. Chiu

DOI: https://doi.org/10.1049/CP:19970187

1997-04-02

Abstract:Ultra-precision machining based on single-point diamond turning and ultra-precision diamond grinding enables economic production of optical, mechanical and electronic components or products with form accuracy and surface roughness in micrometre and nanometre ranges respectively. Associated form and surface roughness measurement technology also plays an important role in evaluating the quality of the ultra-precision machined surfaces. In Hong Kong, the ultra-precision machining centre was established to assist local industry with a full range of facilities and technical services for the rapid development and testing of high-quality ultra-precision products.

Engineering,Materials Science
Optical Surface Generation in Ultra-Precision Polishing of Freeform

张志辉,何丽婷,孔令豹,李荣彬

DOI: https://doi.org/10.3969/j.issn.1007-2276.2010.03.025

2010-01-01

Infrared and Laser Engineering

Abstract:Ultra-precision polishing is an emerging technology for the fabrication of high precision and high quality optical surface of freeform. It is capable of overcoming the shortcomings of other ultra-precision freeform machining technologies, such as the low machining efficiency and non-ferrous materials limitations for ultra-precision raster milling and fast tool servo machining. However, our understanding of the surface generation mechanisms in ultra-precision polishing is far from complete. As a result, an experimental study of the effect of machining strategy on the surface generation in ultra-precision polishing was presented in this paper. A series of polishing experiments had been done. It is interesting to find that the quality of the polished surface heavily relies on a proper selection of process conditions and polishing strategies. The polishing process was not only found to be useful for removing the undesirable machine marks produced by other machining processes but also be able to generate preferred structure texture for functional applications. The results of the study provide an important means for better understanding of the surface generation as well as the strategy for the optimization of the surface quality in ultra-precision polishing of freeform.
Machinability improvement of titanium alloys in ultra-precision machining with micro-structured surface

Wang Sujuan,Yu Liangbao,Qin Chao,Sun Zhanwen

DOI: https://doi.org/10.1177/09544054231191646

2023-08-23

Abstract:Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, Ahead of Print. Titanium alloys get wider applications in different areas due to its excellent mechanical properties. However, poor thermal conductivity and low elastic module of titanium alloy induce high tool wear and make it being one of hard-to-machine materials; especially the segmented chip formation accelerates the diamond tool wear in ultra-precision machining (UPM) of precision parts. This study applies micro-structured surface to improve machinability of titanium alloys in UPM by reducing the chip segmentation induced cutting forces fluctuations. Finite element (FE) model is built to study chip formation mechanism and characterize geometries of segmented chips in orthogonal diamond cutting of Ti6Al4V alloy with the aims at the design of micro-structures array. Turning experiments are conducted to compare cutting force, surface roughness, and tool wear for diamond turning of Ti6Al4V alloy on smooth surface and micro-structured surface. The results show that the FE simulated saw chips agree well with the measured ones. Moreover, the micro-structured surface helps to decrease cutting force, reduce diamond tool wear, and improve surface quality for UPM of titanium alloy. Especially, the new method fabricates micro-grooves array on the machined surface in half-finishing process of UPM without the need of any material pre-processing and extra manufacturing equipment, which can also provide the guidance for efficient and sustainable UPM of titanium alloys parts with high surface quality.

engineering, mechanical, manufacturing
An Investigation of the Cutting Strategy for the Machining of Polar Microstructures Used in Ultra-Precision Machining Optical Precision Measurement

Chen-Yang Zhao,Chi-Fai Cheung,Wen-Peng Fu,Chi Fai Cheung

DOI: https://doi.org/10.3390/mi12070755

IF: 3.4

2021-06-27

Micromachines

Abstract:In this paper, an investigation of cutting strategy is presented for the optimization of machining parameters in the ultra-precision machining of polar microstructures, which are used for optical precision measurement. The critical machining parameters affecting the surface generation and surface quality in the machining of polar microstructures are studied. Hence, the critical ranges of machining parameters have been determined through a series of cutting simulations, as well as cutting experiments. First of all, the influence of field of view (FOV) is investigated. After that, theoretical modeling of polar microstructures is built to generate the simulated surface topography of polar microstructures. A feature point detection algorithm is built for image processing of polar microstructures. Hence, an experimental investigation of the influence of cutting tool geometry, depth of cut, and groove spacing of polar microstructures was conducted. There are transition points from which the patterns of surface generation of polar microstructures vary with the machining parameters. The optimization of machining parameters and determination of the optimized cutting strategy are undertaken in the ultra-precision machining of polar microstructures.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
A comprehensive review of tool surface texturing in the cutting process

Xiaorong Zhou,Lin He,Tao Zhou,Sen Yuan,Pengfei Tian,Zichuan Zou

DOI: https://doi.org/10.1007/s00170-022-10305-0

IF: 3.563

2022-10-29

The International Journal of Advanced Manufacturing Technology

Abstract:The progress of society has a tight relationship to the development of advanced manufacturing technology. Cutting process, a typical machining method, is capable of producing various key parts applied in a considerable number of crucial areas. To enhance the cutting performance, many different measures have been taken, and the surface micro-texture technology has been confirmed as the method showing the greatest potential. A wide variety of micro-textures have been developed on tool surfaces using different design methods. The effect of tool surface texturing on the cutting performance is closely related to micro-texture parameters, whereas the accuracy of micro-texture parameters is primarily dependent on the preparation method of micro-textures. Accordingly, the advanced micro-texture preparation technologies are reviewed in terms of the preparation technology principle, process and characteristics, etc. And the quality of micro-texture prepared using different preparation technologies is analyzed and compared. Subsequently, cutting force, cutting temperature, coefficient of friction, tool wear, chip formation, and machined surface quality are considered as the evaluation indicators to evaluate the effect mechanism of tool surface texturing on the cutting performance, in which the effects of surface micro-textures with different shape parameters, distribution parameters, and size parameters are involved. Furthermore, typical strategies to further enhance the cutting performance of micro-textured tools are analyzed. Finally, the research gaps and future research prospects of tool surface texturing are proposed.

engineering, manufacturing,automation & control systems
A Study of Measurement Technology for Ultra-Precision Freeform Surfaces

H. F. Li,C. F. Cheung,L. B. Kong,W. B. Lee,S. To

DOI: https://doi.org/10.4028/www.scientific.net/kem.339.417

2007-01-01

Key Engineering Materials

Abstract:Ultra-precision freeform surfaces have become widely used in advanced optics manufacture. Although these surfaces can be fabricated by ultra-precision freeform machining technology with sub-micrometer form accuracy and surface finish in nanometer range, our current understanding on the evaluation of surface quality of these surfaces is still far from perfect. In this paper, a study of measurement technology for ultra-precision freeform surfaces is presented.
A review of cutting tools for ultra-precision machining

Ganesan G.,Ganesh Malayath,Rakesh G. Mote

DOI: https://doi.org/10.1080/10910344.2023.2180751

2023-03-21

Machining Science and Technology

Abstract:Ultra-precision cutting (UPC) is an advanced machining process capable of fabricating components with a surface finish and dimensional accuracy in the nanometer range. The cutting tool edge should possess ultra-sharpness and controlled waviness to bring off a higher degree of finish and accuracy. It also should have high hardness, toughness, thermal resistance and chemical inertness. As the cutting-edge radius is in order of nm, the edge characterization is always arduous. Profound knowledge regarding the wear patterns of the UPC tools is indispensable as it will affect the machining quality to a great extent. Hence, to employ a cutting tool for UPC operations, one should know the different variants of UPC and their characteristics, different tool materials and their properties, geometries and how it affects machining accuracy, various edge preparation method and characterization techniques and their limitations, associated measurement errors, tool wear patterns and processes to control the wear. These diverse areas have to be brought under a single roof to systematically choose the material, geometry, and fabrication method for UPC tools. This article provides a comprehensive review of the research related to cutting tools of UPC to understand and evaluate the current trends in the development of UPC tools.

engineering, mechanical, manufacturing,materials science, multidisciplinary
A Study of Ultra-Precision Raster Milling of Optical Freeform Surfaces

Renxian Zhou,Lingbao Kong

DOI: https://doi.org/10.1117/12.2617337

2022-01-01

Abstract:Freeform surface has been widely applied to various optical components which require a surface quality with submicrometer form accuracy and nanometric surface finish. Currently the achievement of such ultra-precision surface quality relies largely on the skills and experience of the operator based on a trial-and-error approach, which is a time consuming and expensive process. Ultra-precision raster milling is an enabling technology to generate freeform surfaces with the optical surface quality without any subsequent processing. This paper presents the fundamental knowledge about ultra-precision raster milling, including the cutting mechanism, cutting strategies, cutting path plans, tool path generation and hence a slide motion error model has been established to predict the form error generation. A series of experimental studies have been undertaken and the prediction results were found to agree well with the measured values.

Key Techniques of Ultra-precision Cutting of Microstructure Surface

The Ultra-precision Machining Technology and It' Domestic and International Progress

An Overview of Ultra-Precision Diamond Machining of Microstructured Freeform Surfaces

Studies on the Surface Quality of the Unsteady-State Grinding Technique

Ultra-precision Machining Technology Based on Laser Trapping

Review on the progress of ultra-precision machining technologies

Special Techniques in Ultra-Precision Machining

Ultra-Precision Manufacturing Technology for Difficult-to-Machine Materials

A review of molecular dynamics simulation in studying surface generation mechanism in ultra-precision cutting

Editorial for the Special Issue on Ultra Precision Technologies for Micromachining, Volume II

&lt;strong&gt;Presentation Title: Ultra-precision machining and measurement of optical microstructures &lt;/strong&gt;

Precision Cutting Technology of Solar Wafer and Characteristic Research

Ultra-Precision Machining: Cutting With Diamond Tools

Development of ultra-precision machining technology

Optical Surface Generation in Ultra-Precision Polishing of Freeform

Machinability improvement of titanium alloys in ultra-precision machining with micro-structured surface

An Investigation of the Cutting Strategy for the Machining of Polar Microstructures Used in Ultra-Precision Machining Optical Precision Measurement

A comprehensive review of tool surface texturing in the cutting process

A Study of Measurement Technology for Ultra-Precision Freeform Surfaces

A review of cutting tools for ultra-precision machining

A Study of Ultra-Precision Raster Milling of Optical Freeform Surfaces

<strong>Presentation Title: Ultra-precision machining and measurement of optical microstructures </strong>